发明授权
- 专利标题: Polishing agent, compound semiconductor manufacturing method, and semiconductor device manufacturing method
- 专利标题(中): 抛光剂,化合物半导体制造方法和半导体器件制造方法
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申请号: US13415859申请日: 2012-03-09
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公开(公告)号: US08841215B2公开(公告)日: 2014-09-23
- 发明人: Keiji Ishibashi , Masashi Futamura , Takayuki Nishiura
- 申请人: Keiji Ishibashi , Masashi Futamura , Takayuki Nishiura
- 申请人地址: JP Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka
- 代理商 James W. Judge
- 优先权: JP2010-108604 20100510
- 主分类号: H01L21/302
- IPC分类号: H01L21/302 ; C09G1/04 ; H01L21/02
摘要:
Afforded are a polishing agent, and a compound semiconductor manufacturing method and semiconductor device manufacturing method utilizing the agent, whereby the surface quality of compound semiconductor substrates can be favorably maintained, and high polishing rates can be sustained as well. The polishing agent is a polishing agent for GaαIn(1-α)AsβP(1-β) (0≦α≦1; 0≦β≦1) compound semiconductors, and includes an alkali metal carbonate, an alkali metal organic salt, a chlorine-based oxidizer, and an alkali metal phosphate, wherein the sum of the concentrations of the alkali metal carbonate and the alkali metal organic salt is between 0.01 mol/L and 0.02 mol/L, inclusive. The compound semiconductor manufacturing method comprises a step of preparing a GaαIn(1-α)AsβP(1-β) (0≦α≦1; 0≦β≦1) compound semiconductor, and a step of polishing the face of the compound semiconductor utilizing an aforedescribed polishing agent.
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