发明授权
US08842284B2 Magnifying imaging optical unit and metrology system including same
有权
放大成像光学单元和包括其的计量系统
- 专利标题： Magnifying imaging optical unit and metrology system including same
- 专利标题（中）： 放大成像光学单元和包括其的计量系统
-
申请号： US13357222申请日： 2012-01-24
-
公开(公告)号： US08842284B2公开(公告)日： 2014-09-23
- 发明人: Hans-Juergen Mann
- 申请人： Hans-Juergen Mann
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT GmbH
- 当前专利权人： Carl Zeiss SMT GmbH
- 当前专利权人地址： DE Oberkochen
- 代理机构： Fish & Richardson P.C.
- 优先权： DE102009035583 20090729
- 主分类号： G01N21/00
- IPC分类号： G01N21/00 ; G02B17/06 ; G03F7/20
摘要：
A magnifying imaging optical unit has at least four mirrors to image an object field in an object plane into an image field in an image plane. An absolute value of the Petzval radius of the image field is greater than 500 mm. The imaging optical unit can be used to inspect with sufficient imaging quality relatively large mask sections of lithography masks used during projection exposure to produce large scale integrated semiconductor components.
公开/授权文献
信息查询
