发明授权
- 专利标题: MEMS switch and communication device using the same
- 专利标题(中): MEMS开关和通讯装置使用相同
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申请号: US13262666申请日: 2010-08-26
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公开(公告)号: US08847087B2公开(公告)日: 2014-09-30
- 发明人: Yasuyuki Naito , Xavier Rottenberg , Jan Bienstman , Hendrikus A. C. Tilmans
- 申请人: Yasuyuki Naito , Xavier Rottenberg , Jan Bienstman , Hendrikus A. C. Tilmans
- 申请人地址: JP Osaka BE Leuven
- 专利权人: Panasonic Corporation,IMEC
- 当前专利权人: Panasonic Corporation,IMEC
- 当前专利权人地址: JP Osaka BE Leuven
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JPP2009-215844 20090917
- 国际申请: PCT/JP2010/005269 WO 20100826
- 国际公布: WO2011/033729 WO 20110324
- 主分类号: H01H1/50
- IPC分类号: H01H1/50 ; H01H59/00
摘要:
A MEMS switch is provided wherein contact force sufficient to make a contact having low contact resistance is maintained after contact-formation to maintain low contact resistance at the signal transmission contact in “on” state. Provided is a MEMS switch 100 including a first electrode 101, a second electrode 104 opposed to and separated from the first electrode, a third and a fourth electrodes 1021 and 1022, wherein electrical contact is made between the electrodes 101 and 104 by electrostatic force generated between the electrode 101 and the electrodes 1021, 1022, and a bump which can form the contact between the electrode 101 and the electrode 1021 and/or 1022 is provided on the electrode 101, and a gap is formed between the electrode 101 and the electrode 1021 and/or 1022 when the electrical contact is made, and control signals are input to the electrodes 1021 and 1022 independently.
公开/授权文献
- US20120031744A1 MEMS SWITCH AND COMMUNICATION DEVICE USING THE SAME 公开/授权日:2012-02-09
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