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公开(公告)号：US08723061B2
公开(公告)日：2014-05-13
申请号：US13265970
申请日：2010-08-26
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01H2059/0072
摘要： A MEMS switch in which contact force sufficient to make a contact having low contact resistance is maintained after contact-formation to maintain low contact resistance at the contact where the signal is transmitted in an “on” state. The MEMS switch includes a first electrode, a second electrode opposed to and separated from the first electrode, a third and a fourth electrodes, wherein electrical contact is made between the electrodes by electrostatic force generated between the electrodes, and a bump which can form the contact between the electrodes is provided on an electrode, and a gap is formed between the electrodes when the electrical contact is made between the electrodes.
摘要翻译： 在接触形成之后，保持接触力足以形成具有低接触电阻的接触力的MEMS开关，以保持信号在“接通”状态下的接触处的低接触电阻。 MEMS开关包括第一电极，与第一电极相对并分离的第二电极，第三和第四电极，其中通过在电极之间产生的静电力在电极之间形成电接触，以及可形成 电极之间的接触设置在电极上，并且当在电极之间形成电接触时，在电极之间形成间隙。
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公开(公告)号：US08711917B2
公开(公告)日：2014-04-29
申请号：US12812655
申请日：2009-01-16
申请人： Satoshi Tsukamoto , Noriaki Saito , Katsuaki Abe , Kentaro Miyano , Yoshifumi Hosokawa , Yasuyuki Naito
发明人： Satoshi Tsukamoto , Noriaki Saito , Katsuaki Abe , Kentaro Miyano , Yoshifumi Hosokawa , Yasuyuki Naito
CPC分类号： H03H19/004
摘要： A sampling filter device wherein the filter characteristic is variable without using a control signal of a complicated waveform is provided. A sampling filter device 105 has integration capacitors 130 and 131, an integration time adjustment section 180, and a plurality of switches 100, 101, 110, and 111. Input current is integrated in different time duration with one clock and is stored in the integration capacitors 130 and 131 and charges stored in the integration capacitor from several clocks before to one clock before are added and the result is output. When charge is stored in the integration capacitors 130 and 131 with each clock, the integration time duration is changed, whereby it is made possible to weight and add output charge and the filter characteristic changes.
摘要翻译： 提供了一种采样滤波器装置，其中滤波器特性是可变的，而不使用复杂波形的控制信号。 采样滤波器装置105具有积分电容器130和131，积分时间调整部分180和多个开关100,101,110和111.输入电流在一个时钟内以不同的持续时间被积分并被存储在积分 电容器130和131以及存储在积分电容器中的电荷从加到之前的一个时钟之前的几个时钟相加，并且输出结果。 当在每个时钟存储积分电容器130和131中的电荷时，积分持续时间被改变，从而可以对输出电荷进行加权和增加并且滤波器特性改变。
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公开(公告)号：US08610224B2
公开(公告)日：2013-12-17
申请号：US13590439
申请日：2012-08-21
CPC分类号： H01L29/84 , B81C1/00293
摘要： In a MEMS element 500 where a MEMS structure 201 is hermetically sealed in a cavity 110 by a substrate 301 and laminated structure 120, interface sealing layers 101, 102 and 103 are provided between two layers that constitute the laminated structure 120, so as to prevent gas from breaking into the cavity 110 through the interface between two layers along the direction parallel to the surface of the substrate 301.
摘要翻译： 在通过基板301和层叠结构120将MEMS结构201气密地密封在空腔110中的MEMS元件500中，在构成层叠结构120的两层之间设置界面密封层101,102和103，以防止 气体沿着平行于衬底301的表面的方向通过两层之间的界面而进入空腔110。
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4.发明授权公开(公告)号：US08115577B2
公开(公告)日：2012-02-14
申请号：US12137812
申请日：2008-06-12
申请人： Hiroshi Nakatsuka , Yasuyuki Naito , Keiji Onishi
发明人： Hiroshi Nakatsuka , Yasuyuki Naito , Keiji Onishi
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H57/00 , H01H2057/006
摘要： An electromechanical switch includes a first beam, a second beam arranged in parallel with the first beam and connected to the first beam through a connecting portion, a first electrode formed so as to have a first gap with respect to the first beam, a voltage applying portion which applies a voltage between the first beam and the first electrode, and a second electrode formed so as to have a second gap with respect to the second beam. The second gap is greater than the first gap. The first beam is displaced when the voltage applying portion applies the voltage between the first beam and the first electrode, so that switching between the second beam and the second electrode is performed in a state that the first beam is not electrically connected to the first electrode.
摘要翻译： 机电开关包括第一光束，与第一光束平行设置的第二光束，并通过连接部分连接到第一光束;第一电极，其形成为相对于第一光束具有第一间隙;施加电压 在第一光束和第一电极之间施加电压的部分，以及形成为相对于第二光束具有第二间隙的第二电极。 第二个差距大于第一个差距。 当电压施加部分施加第一光束和第一电极之间的电压时，第一光束被移位，使得在第一光束不与第一电极电连接的状态下执行第二光束和第二电极之间的切换 。
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公开(公告)号：US07978034B2
公开(公告)日：2011-07-12
申请号：US12304757
申请日：2007-06-14
申请人： Yasuyuki Naito , Yoshito Nakanishi
发明人： Yasuyuki Naito , Yoshito Nakanishi
IPC分类号： H01H51/22
CPC分类号： B81B3/0078 , B81B2201/016 , H01H59/0009 , H01H69/01
摘要： A quick response/low voltage driven electromechanical switch equipped with a mechanism for adjusting a spring constant of a movable electrode is provided. The electromechanical element includes a first electrode formed on a substrate, a second electrode formed at a predetermined interval to the first electrode so that the interval is changed, and supporting portions for supporting the second electrode, wherein the supporting portions of the second electrode are able to be displaced.
摘要翻译： 提供一种具有用于调节可动电极的弹簧常数的机构的快速响应/低压驱动机电开关。 机电元件包括形成在基板上的第一电极，以第一电极以预定间隔形成的间隔改变的第二电极和用于支撑第二电极的支撑部分，其中第二电极的支撑部分能够 被流离失所
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公开(公告)号：US07973586B2
公开(公告)日：2011-07-05
申请号：US12532530
申请日：2008-03-17
IPC分类号： G06G7/12
摘要： A sampling mixer includes TAs (transconductance amplifiers), an in-phase mixer section connected to the TA and the TA, an opposite-phase mixer section connected in parallel with the in-phase mixer section, and a signal generator for generating a control signal for the in-phase mixer section and the opposite-phase mixer section respectively. The IIR filter using signals that underwent a current conversion by using the different transconductances is constructed, so that the filter characteristic can be designed by a weighting of the transconductance in addition to a capacitance ratio. As a result, the wide-band filter characteristic and the band-pass filter characteristic can be obtained, and deterioration of the receiving sensitivity can be suppressed by designing the filter characteristic suitable for the radio communication system.
摘要翻译： 采样混频器包括TA（跨导放大器），连接到TA和TA的同相混频器部分，与同相混频器部分并联连接的反相混频器部分和用于产生控制信号的信号发生器 分别用于同相混合器部分和反相混合器部分。 构成使用通过使用不同的跨导进行电流转换的信号的IIR滤波器，从而除了电容比之外，可以通过加权跨导来设计滤波器特性。 结果，可以获得宽带滤波器特性和带通滤波器特性，并且可以通过设计适合于无线电通信系统的滤波特性来抑制接收灵敏度的劣化。
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7.发明申请公开(公告)号：US20090283391A1
公开(公告)日：2009-11-19
申请号：US12520316
申请日：2008-11-12
申请人： Yasuyuki Naito
发明人： Yasuyuki Naito
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , B81B3/0086 , H01P1/127
摘要： When a high power signal is input to an electromechanical device, electrostatic force can automatically and unintentionally drive the movable electrode. A high reliability electromechanical device that prevents this is achieved. The electromechanical device of the invention is an electromechanical device formed on a substrate, and having a signal electrode and a drive electrode formed across a gap from a movable electrode. Applying an attraction force between the movable electrode and the drive electrode enables the movable electrode to contact the signal electrode. A high electrostatic capacitance is formed by disposing the movable electrode and drive electrode in opposition with a dielectric layer therebetween on the RF signal input port side. As a result, the potential difference between the movable electrode and drive electrode is reduced even when a high power signal is input, and a high reliability electromechanical device can be achieved.
摘要翻译： 当高功率信号被输入到机电装置时，静电力可以自动和无意地驱动可动电极。 实现了防止这一点的高可靠性机电装置。 本发明的机电装置是形成在基板上的机电装置，具有形成在与可动电极的间隙上的信号电极和驱动电极。 在可动电极和驱动电极之间施加吸引力使得可动电极与信号电极接触。 通过将可动电极和驱动电极与RF信号输入端侧之间的电介质层相对设置，形成高静电电容。 结果，即使输入高功率信号，也可以减小可动电极与驱动电极之间的电位差，能够实现高可靠性的机电装置。
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公开(公告)号：US07551044B2
公开(公告)日：2009-06-23
申请号：US10598844
申请日：2005-06-13
申请人： Yasuyuki Naito
发明人： Yasuyuki Naito
IPC分类号： H03H9/00
CPC分类号： H03H9/2463 , H03H3/0072 , H03H9/02259 , H03H2009/02496 , H03H2009/02511 , H03H2009/02527
摘要： To provide an electromechanical signal selection device which can be miniaturized and highly integrated and which can selectively output only a signal of a predetermined frequency without providing any sensitive vibration sensing mechanism, and electric equipment using the electromechanical signal selection device.A micro-vibrator serving as a resonator is provided. The micro-vibrator can be excited by an external force to excite vibration of the micro-vibrator. A material whose physical property is changed in accordance with a structural change is used as the micro-vibrator. Thus, a sensitive electromechanical signal selection device is obtained.
摘要翻译： 提供可以小型化和高度集成的机电信号选择装置，并且可以选择性地仅输出预定频率的信号而不提供任何敏感的振动感测机构，以及使用机电信号选择装置的电气设备。 提供用作谐振器的微型振动器。 微振动器可以通过外力激发以激发微振动器的振动。 物理性质根据结构变化而变化的材料被用作微型振动器。 因此，获得敏感的机电信号选择装置。
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9.发明授权公开(公告)号：US07545236B2
公开(公告)日：2009-06-09
申请号：US10599957
申请日：2005-04-11
申请人： Yasuyuki Naito
发明人： Yasuyuki Naito
CPC分类号： H03H9/2426 , H03H9/02259 , H03H9/2463 , H03H9/462 , H03H9/465 , H03H2009/02496
摘要： An electromechanical filter capable of attaining a size reduction and a higher integration and executing a high-sensitivity signal sensing is provided. A quantum device is used as a sensing portion to implement a fine and highly sensitive sensing. A microvibrator 101 that is able to resonate with an input signal, and a sensing electrode 103 arranged at a predetermined interval to the microvibrator are provided. Since a change in an electrostatic capacity between the microvibrator and the sensing electrode can be sensed, a high-sensitivity sensing mechanism that is hard to realize in the prior art can be achieved.
摘要翻译： 提供了能够实现尺寸减小和更高集成度并执行高灵敏度信号感测的机电滤波器。 量子器件用作感测部分以实现精细和高度敏感的感测。 提供能够与输入信号谐振的微振荡器101和以预定间隔布置到微振动器的感测电极103。 由于可以感测到微振荡器和感测电极之间的静电电容的变化，所以可以实现现有技术难以实现的高灵敏度感测机构。
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10.发明申请公开(公告)号：US20080283374A1
公开(公告)日：2008-11-20
申请号：US12121233
申请日：2008-05-15
申请人： Yasuyuki Naito
发明人： Yasuyuki Naito
IPC分类号： H01H36/00
CPC分类号： H01H59/0009 , H01H1/06 , H01H1/18
摘要： An electromechanical element includes a first electrode which is provided on a substrate, and a second electrode and a third electrode which are provided via a gap with respect to the first electrode. The first electrode contacts with the second electrode when an attracting force is applied between the first electrode and the third electrode. The first electrode has a bending portion.
摘要翻译： 机电元件包括设置在基板上的第一电极和经由相对于第一电极的间隙设置的第二电极和第三电极。 当在第一电极和第三电极之间施加吸引力时，第一电极与第二电极接触。 第一电极具有弯曲部分。
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