发明授权
- 专利标题: Elastic wave device and method for manufacturing the same
- 专利标题(中): 弹性波装置及其制造方法
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申请号: US13127215申请日: 2008-11-28
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公开(公告)号: US08854158B2公开(公告)日: 2014-10-07
- 发明人: Tsuyoshi Yokoyama , Shinji Taniguchi , Masafumi Iwaki , Motoaki Hara , Takeshi Sakashita , Tokihiro Nishihara , Masanori Ueda
- 申请人: Tsuyoshi Yokoyama , Shinji Taniguchi , Masafumi Iwaki , Motoaki Hara , Takeshi Sakashita , Tokihiro Nishihara , Masanori Ueda
- 申请人地址: JP Tokyo
- 专利权人: Taiyo Yuden Co., Ltd.
- 当前专利权人: Taiyo Yuden Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Chen Yoshimura LLP
- 国际申请: PCT/JP2008/071714 WO 20081128
- 国际公布: WO2010/061479 WO 20100603
- 主分类号: H03H9/54
- IPC分类号: H03H9/54 ; H03H3/04 ; H03H9/56 ; H03H9/17
摘要:
A method of manufacturing an elastic wave device is provided with a lamination step of forming, on a substrate (1), a plurality of elastic wave devices, each of which includes a lower electrode (2), a piezoelectric film (3), and an upper electrode (4); a measuring step for measuring the operation frequency distribution of the elastic wave devices on the substrate (1); and an adjusting step for forming an adjusting region, in which the thickness of the elastic wave device is different from the thicknesses of other portions in a resonance portion of each elastic wave device, corresponding with the distribution of the operation frequencies. The adjusting region is formed so that the size of the area of the adjusting region of the resonator portion of each elastic wave device is different in accordance with the operation frequency distribution that is measured. Thus, the frequency characteristics of the elastic wave devices are easily adjusted by a small number of steps.
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