发明授权
- 专利标题： Apparatus and method of fabricating flat panel display device
- 专利标题（中）： 制造平板显示装置的装置及方法
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申请号： US13087519申请日： 2011-04-15
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公开(公告)号： US08858859B2公开(公告)日： 2014-10-14
- 发明人: Tae-Joon Song , Dhang Kwon , Hang-Sup Cho , Seong-Pil Cho , Ho Su Kim , Doo-Hee Jang
- 申请人： Tae-Joon Song , Dhang Kwon , Hang-Sup Cho , Seong-Pil Cho , Ho Su Kim , Doo-Hee Jang
- 申请人地址： KR Seoul
- 专利权人： LG Display Co., Ltd.
- 当前专利权人： LG Display Co., Ltd.
- 当前专利权人地址： KR Seoul
- 代理机构： Morgan, Lewis & Bockius LLP
- 优先权： KR10-2010-0040645 20100430
- 主分类号： B28B11/08
- IPC分类号： B28B11/08 ; B82Y40/00 ; G03F7/00 ; B82Y10/00
摘要：
Disclosed are an apparatus and method for fabricating a flat panel display device to realize easy separation of a substrate from an imprinting mold. The apparatus includes an imprinting mold connected to a substrate to form a thin film pattern on the substrate, a first adsorption pad to vacuum-adsorb the center of the imprinting mold, a second adsorption pad to vacuum-adsorb the periphery of the imprinting mold, and a connector connected to vacuum pins to vertically move in different regions of the first and second adsorption pads.
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