摘要:
A flat panel display device includes a thin film pattern formed by an imprinting mold pressing imprinting resin on a substrate, an outer thin film pattern formed on an outer region of the substrate, adjacent to the thin film pattern, wherein the outer thin film pattern is used as a demolding seed for demolding the substrate from the imprinting mold, and the outer thin film pattern configured to limit movement of the imprinting resin.
摘要:
An apparatus and a method of fabricating a thin film pattern, capable of forming a demolding seed between an imprinting mold and a substrate in a demolding process of demolding an imprinting mold from a substrate, are disclosed. The method of fabricating a thin film pattern includes coating imprinting resin on the other region except an edge region of a substrate, forming a thin film pattern on the substrate by contacting an imprinting mold with the imprinting resin, and demolding the imprinting mold from the substrate.
摘要:
Disclosed is an imprinting apparatus and imprinting method using the same that prevent a process of forming a pattern on a substrate from being affected by flatness of a stage. The imprinting apparatus comprises a chamber unit in which a process of forming a pattern on a substrate is carried out; a stage for supporting the substrate on which a resin layer is formed; an installing member positioned above the stage and having a mold member attached to transform the resin layer so as to form the pattern on the substrate; and a first spraying unit for spraying fluid to separate the substrate supported by the stage from the stage, wherein the installing member moves the mold member in the direction getting near to the substrate separated from the stage so that the mold member and the resin layer are brought into contact with each other.
摘要:
A flat panel display device includes a thin film pattern formed by an imprinting mold pressing imprinting resin on a substrate, an outer thin film pattern formed on an outer region of the substrate, adjacent to the thin film pattern, wherein the outer thin film pattern is used as a demolding seed for demolding the substrate from the imprinting mold, and the outer thin film pattern configured to limit movement of the imprinting resin.
摘要:
Disclosed are an apparatus and method for fabricating a flat panel display device to realize easy separation of a substrate from an imprinting mold. The apparatus includes an imprinting mold connected to a substrate to form a thin film pattern on the substrate, a first adsorption pad to vacuum-adsorb the center of the imprinting mold, a second adsorption pad to vacuum-adsorb the periphery of the imprinting mold, and a connector connected to vacuum pins to vertically move in different regions of the first and second adsorption pads.
摘要:
Disclosed is an imprinting apparatus and imprinting method using the same that prevent a process of forming a pattern on a substrate from being affected by flatness of a stage. The imprinting apparatus comprises a chamber unit in which a process of forming a pattern on a substrate is carried out; a stage for supporting the substrate on which a resin layer is formed; an installing member positioned above the stage and having a mold member attached to transform the resin layer so as to form the pattern on the substrate; and a first spraying unit for spraying fluid to separate the substrate supported by the stage from the stage, wherein the installing member moves the mold member in the direction getting near to the substrate separated from the stage so that the mold member and the resin layer are brought into contact with each other.
摘要:
A method of fabricating an imprint mold is disclosed. The method includes: forming a first photo resist pattern on a substrate; etching the substrate using the first photo resist pattern as an etch mask to form a first pattern in the substrate; ashing the first photo resist pattern to form a second photo resist pattern; and etching the substrate using the second photo resist pattern to form a second pattern derived from the substrate and a third pattern derived from the first pattern.
摘要:
A method of fabricating an imprint mold is disclosed. The method includes: forming a first photo resist pattern on a substrate; etching the substrate using the first photo resist pattern as an etch mask to form a first pattern in the substrate; ashing the first photo resist pattern to form a second photo resist pattern; and etching the substrate using the second photo resist pattern to form a second pattern derived from the substrate and a third pattern derived from the first pattern.
摘要:
A liquid crystal display (LCD) device maintains a cell gap and prevents press defects via the use of ball spacers. The liquid crystal display device includes first and second substrates facing each other, a plurality of first spacers, a plurality of second spacers, and a liquid crystal layer filled between the first and second substrates. The first spacers are formed between the first and second substrates at portions of a black matrix layer of the second substrate. The first spacers include a plurality of first balls with a first diameter and a first solid to aggregate the first balls. The second spacers are formed at portions of the black matrix layer between the first and second substrates. The second spacers include a plurality of second balls with a second diameter 0.2 to 0.6 μm smaller than the first diameter and a second solid to aggregate the second balls.
摘要:
Disclosed herein are a liquid crystal display (LCD) device and a method for manufacturing the same, capable of preventing problems (i.e., movement of balls, damage to the surfaces that face spacers upon application of predetermined pressure, and variation in cell gap) associated with the use of the ball spacers. The liquid crystal display device includes a first substrate and a second substrate facing each other, a spacer formed on the first substrate, wherein the spacer includes a plurality of balls and a solid to aggregate the balls together and adhere the balls to the first substrate, a hard coating layer formed on the second substrate facing the spacer, and a liquid crystal layer filled between the first substrate and the second substrate.