Invention Grant
- Patent Title: Oxide semiconductor film and semiconductor device
- Patent Title (中): 氧化物半导体膜和半导体器件
-
Application No.: US13862716Application Date: 2013-04-15
-
Publication No.: US08860022B2Publication Date: 2014-10-14
- Inventor: Toshinari Sasaki , Shuhei Yokoyama , Takashi Hamochi , Yusuke Nonaka , Yasuharu Hosaka
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP2012-103302 20120427
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/786 ; H01L27/12

Abstract:
A method for evaluating an oxide semiconductor film, a method for evaluating a transistor including an oxide semiconductor film, a transistor which includes an oxide semiconductor film and has favorable switching characteristics, and an oxide semiconductor film which is applicable to a transistor and enables the transistor to have favorable switching characteristics are provided. A PL spectrum of an oxide semiconductor film obtained by low-temperature PL spectroscopy has a first curve whose local maximum value is found in a range of 1.6 eV or more and 1.8 eV or less and a second curve whose local maximum value is found in a range of 1.7 eV or more and 2.4 eV or less. A value obtained by dividing the area of the second curve by the sum of the area of the first curve and the area of the second curve is 0.1 or more and less than 1.
Public/Granted literature
- US20130285045A1 OXIDE SEMICONDUCTOR FILM AND SEMICONDUCTOR DEVICE Public/Granted day:2013-10-31
Information query
IPC分类: