Invention Grant
US08860283B2 Electrostatic actuator of a mobile structure with improved relaxation of trapped charges 有权
移动式结构的静电致动器具有改善的被捕获电荷放松的能力

Electrostatic actuator of a mobile structure with improved relaxation of trapped charges
Abstract:
The device comprises a first actuating bump made from electrically conducting material with a first contact surface. A second actuating bump made from electrically conducting material is facing the first actuating bump. An electrostatic actuating circuit moves the actuating bumps with respect to one another between a first position and another position. The actuating circuit comprises a device for applying a higher potential on the second actuating bump than on the first actuating bump. A film of electrically insulating material performs electric insulation between the first and second bumps. The electrically insulating material film comprises an interface with a positive ion source and is permeable to said positive ions.
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