发明授权
- 专利标题: Self-aligned coverage of opaque conductive areas
- 专利标题(中): 不透明导电区域的自对准覆盖
-
申请号: US13816251申请日: 2011-07-29
-
公开(公告)号: US08865394B2公开(公告)日: 2014-10-21
- 发明人: Sören Hartmann , Christoph Rickers , Herbert Friedrich Boerner , Herbert Lifka , Holger Schwab
- 申请人: Sören Hartmann , Christoph Rickers , Herbert Friedrich Boerner , Herbert Lifka , Holger Schwab
- 申请人地址: NL Eindhoven
- 专利权人: Koninklijke Philips N.V.
- 当前专利权人: Koninklijke Philips N.V.
- 当前专利权人地址: NL Eindhoven
- 代理商 Meenakshy Chakravorty
- 优先权: EP10173728 20100823
- 国际申请: PCT/IB2011/053382 WO 20110729
- 国际公布: WO2012/025847 WO 20120301
- 主分类号: H01L21/70
- IPC分类号: H01L21/70 ; G03F7/20 ; H01L51/52 ; H01L51/00
摘要:
The invention relates to a method enabling to apply cheap manufacturing techniques for producing reliable and robust organic thin film device (EL) comprising the steps of providing (P) a transparent substrate (1) at least partly covered with a first layer stack comprising at least one transparent layer (2), preferably an electrically conductive layer, and a pattern of first and second opaque conductive areas (31, 32) deposited on top of the transparent layer (2), depositing (D) a photoresist layer (4) made of an electrically insulating photoresist resist material on top of the first layer stack at least fully covering the second opaque conductive areas (32), illuminating (IL) the photoresist layer (4) through the transparent substrate (1) with light (5) of a suitable wavelength to make the photoresist material soluble in the areas (43) of the photoresist layer (4) having no opaque conductive areas (31, 32) underneath, removing (R) the soluble areas (43) of the photoresist layer (4), heating (B) the areas (42) of the photoresist layer (4) remaining on top of at least the second opaque conductive areas (32) to re-flow the photoresist layer (4) to cover the edges (E) of the second opaque conductive areas (32) in contact to the transparent layer (2), and hardening (H) the remaining areas (42) of the photoresist layer (4). The invention further relates to a conductive component (CC) for use in these organic thin film devices (EL) and to the organic thin film devices (EL) itself.
公开/授权文献
- US20130146859A1 SELF-ALIGNED COVERAGE OF OPAQUE CONDUCTIVE AREAS 公开/授权日:2013-06-13
信息查询
IPC分类: