发明授权
- 专利标题: Silsequioxane-titania hybrid polymers
- 专利标题(中): 硅氧烷 - 二氧化钛杂化聚合物
-
申请号: US12091811申请日: 2006-10-25
-
公开(公告)号: US08865845B2公开(公告)日: 2014-10-21
- 发明人: Paul J. Popa , Lynne K. Mills , Kevin E. Howard
- 申请人: Paul J. Popa , Lynne K. Mills , Kevin E. Howard
- 专利权人: Dow Global Technologies LLC
- 当前专利权人: Dow Global Technologies LLC
- 国际申请: PCT/US2006/041662 WO 20061025
- 国际公布: WO2007/053396 WO 20070510
- 主分类号: C08F283/12
- IPC分类号: C08F283/12 ; G03F7/09 ; C08G77/58 ; G03F7/075
摘要:
The invention relates to silsesquioxane-titania hybrid polymers, wherein the titania domain size is less than about five nanometers. Such polymers are useful, for example, to form anti-reflection coatings in the fabrication of microelectronic devices.
公开/授权文献
- US20100221666A1 SILSEQUIOXANE-TITANIA HYBRID POLYMERS 公开/授权日:2010-09-02