Invention Grant
US08865852B2 Siloxane-based low dielectric constant thin films using cyclo-siloxane and a method for preparing the same
有权
使用环硅氧烷的基于硅氧烷的低介电常数薄膜及其制备方法
- Patent Title: Siloxane-based low dielectric constant thin films using cyclo-siloxane and a method for preparing the same
- Patent Title (中): 使用环硅氧烷的基于硅氧烷的低介电常数薄膜及其制备方法
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Application No.: US12909554Application Date: 2010-10-21
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Publication No.: US08865852B2Publication Date: 2014-10-21
- Inventor: Kyung Youl Baek , Seung Sang Hwang , Seung-Sock Choi , Sungyoun Oh , He Seung Lee , Eun Kyeong Kim
- Applicant: Kyung Youl Baek , Seung Sang Hwang , Seung-Sock Choi , Sungyoun Oh , He Seung Lee , Eun Kyeong Kim
- Applicant Address: KR
- Assignee: Korea Institute of Science and Technology
- Current Assignee: Korea Institute of Science and Technology
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2010-0064332 20100705
- Main IPC: C08G77/04
- IPC: C08G77/04 ; C08L83/06 ; C08G77/16

Abstract:
A low-dielectric constant thin film prepared from a silsesquioxane polymer matrix as a precursor and a method for preparing the same which comprises preparing silsesquioxane sol by adding a stereoisomer of a multi reactive cyclosiloxane to an alkoxysilane are provided. The low-dielectric-constant thin film retains a stable film state even at a curing temperature of −500° C. without being decomposed, a very uniform surface property with a low surface modulus, and a superior coatability as to be coatable smoothly with no crack even with a thickness of 500 nm or larger.
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