发明授权
- 专利标题: Variable resistance nonvolatile storage device and method for manufacturing the same
- 专利标题(中): 可变电阻非易失性存储装置及其制造方法
-
申请号: US13805233申请日: 2012-01-30
-
公开(公告)号: US08871561B2公开(公告)日: 2014-10-28
- 发明人: Ichirou Takahashi , Takumi Mikawa
- 申请人: Ichirou Takahashi , Takumi Mikawa
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Wenderoth, Lind & Ponack, LLP.
- 优先权: JP2011-020073 20110201
- 国际申请: PCT/JP2012/000585 WO 20120130
- 国际公布: WO2012/105225 WO 20120809
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/20 ; H01L45/00 ; H01L27/24
摘要:
Provided is a method for manufacturing a variable resistance nonvolatile storage device, which prevents electrical conduction between lower electrodes and upper electrodes of variable resistance elements in the memory cell holes. The method includes: forming lower copper lines; forming a third interlayer insulating layer; forming memory cell holes in the third interlayer insulating layer, an opening diameter of upper portions of the memory cell holes being smaller than bottom portions; forming a metal electrode layer on the bottom of each memory cell holes by sputtering; embedding and forming a variable resistance layer in each memory cell hole; and forming upper copper lines connected to the variable resistance layer embedded and formed in each memory cell hole.
公开/授权文献
信息查询
IPC分类: