发明授权
US08871561B2 Variable resistance nonvolatile storage device and method for manufacturing the same 有权
可变电阻非易失性存储装置及其制造方法

Variable resistance nonvolatile storage device and method for manufacturing the same
摘要:
Provided is a method for manufacturing a variable resistance nonvolatile storage device, which prevents electrical conduction between lower electrodes and upper electrodes of variable resistance elements in the memory cell holes. The method includes: forming lower copper lines; forming a third interlayer insulating layer; forming memory cell holes in the third interlayer insulating layer, an opening diameter of upper portions of the memory cell holes being smaller than bottom portions; forming a metal electrode layer on the bottom of each memory cell holes by sputtering; embedding and forming a variable resistance layer in each memory cell hole; and forming upper copper lines connected to the variable resistance layer embedded and formed in each memory cell hole.
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