发明授权
US08872112B2 Hybrid THz imaging detector with vertical antenna and sub-pixel suspended MEMS thermal sensor and actuator
有权
具有垂直天线和子像素悬置的MEMS热传感器和执行器的混合太赫兹成像检测器
- 专利标题: Hybrid THz imaging detector with vertical antenna and sub-pixel suspended MEMS thermal sensor and actuator
- 专利标题(中): 具有垂直天线和子像素悬置的MEMS热传感器和执行器的混合太赫兹成像检测器
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申请号: US13251255申请日: 2011-10-02
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公开(公告)号: US08872112B2公开(公告)日: 2014-10-28
- 发明人: Dan Corcos , Michel Despont , Danny Elad , Lukas Kull , Thomas Morf , Benny Sheinman
- 申请人: Dan Corcos , Michel Despont , Danny Elad , Lukas Kull , Thomas Morf , Benny Sheinman
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: G01J5/02
- IPC分类号: G01J5/02 ; G01N21/35 ; B81B3/00 ; H01L31/09 ; G01J5/08 ; G01J5/00 ; G01J3/42
摘要:
A THz radiation detector comprising a vertical antenna separated from a suspended platform by an isolating thermal air gap for concentrating THz radiation energy into a smaller suspended MEMS platform upon which a thermal sensor element is located. THz photon energy is converted into electrical energy via a thermally isolated air gap between plates of a coupling capacitor that couples energy from the antenna to the thermal sensor. The capacitor plates used for capacitive coupling of the received signal realize an electro-static actuator whereby the application of a DC bias varies the coupling capacitor gap. The DC bias causes the actuator to pull the suspended platform close to the antenna to reduce the capacitive gap, increasing the coupling capacitance, to touch the antenna array thus quickly discharging the heat induced in the sensor platform or to perform advanced readout operations, such as amplitude modulation and correlated double sampling.
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