Invention Grant
US08873596B2 Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal
有权
激光质量高,输出光束稳定,寿命长,转换效率高的非线性晶体
- Patent Title: Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal
- Patent Title (中): 激光质量高,输出光束稳定,寿命长,转换效率高的非线性晶体
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Application No.: US13412564Application Date: 2012-03-05
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Publication No.: US08873596B2Publication Date: 2014-10-28
- Inventor: Vladimir Dribinski , Yung-Ho Alex Chuang , J. Joseph Armstrong , John Fielden
- Applicant: Vladimir Dribinski , Yung-Ho Alex Chuang , J. Joseph Armstrong , John Fielden
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Bever, Hoffman & Harms, LLP
- Agent Jeanette S. Harms
- Main IPC: H01S3/098
- IPC: H01S3/098 ; G01N21/94 ; C30B29/10 ; G02F1/37 ; C30B33/02 ; G01N21/95 ; H01S3/00 ; G01N21/88 ; G02F1/35 ; G02F1/355

Abstract:
A mode-locked laser system operable at low temperature can include an annealed, frequency-conversion crystal and a housing to maintain an annealed condition of the crystal during standard operation at the low temperature. In one embodiment, the crystal can have an increased length. First beam shaping optics can be configured to focus a beam from a light source to an elliptical cross section at a beam waist located in or proximate to the crystal. A harmonic separation block can divide an output from the crystal into beams of different frequencies separated in space. In one embodiment, the mode-locked laser system can further include second beam shaping optics configured to convert an elliptical cross section of the desired frequency beam into a beam with a desired aspect ratio, such as a circular cross section.
Public/Granted literature
- US20130021602A1 Laser With High Quality, Stable Output Beam, And Long Life High Conversion Efficiency Non-Linear Crystal Public/Granted day:2013-01-24
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