中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

12 records (took 0.033 seconds)

    Illuminating a specimen for metrology or inspection
    1.
    发明授权
    Illuminating a specimen for metrology or inspection 有权
    照亮样本进行计量或检查

    公开(公告)号：US09080991B2

    公开(公告)日：2015-07-14

    申请号：US13073986

    申请日：2011-03-28

    Applicant: Yung-Ho (Alex) Chuang ,  Vladimir Levinski ,  Xuefeng Liu ,  John Fielden

    Inventor： Yung-Ho (Alex) Chuang ,  Vladimir Levinski ,  Xuefeng Liu ,  John Fielden

    IPC: G01N21/00 ,  G01N21/95 ,  G01N21/47

    CPC classification number: G01N21/9501 ,  G01N2021/479

    Abstract: Illumination subsystems of a metrology or inspection system, metrology systems, inspection systems, and methods for illuminating a specimen for metrology measurements or for inspection are provided. One illumination subsystem includes a light source configured to generate coherent pulses of light and a dispersive element positioned in the path of the coherent pulses of light, which is configured to reduce coherence of the pulses of light by mixing spatial and temporal characteristics of light distribution in the pulses of light. The illumination subsystem also includes an electro-optic modulator positioned in the path of the pulses of light exiting the dispersive element and which is configured to reduce the coherence of the pulses of light by temporally modulating the light distribution in the pulses of light. The illumination subsystem is configured to direct the pulses of light from the electro-optic modulator to a specimen.

    Abstract translation: 提供了计量或检查系统的照明子系统，计量系统，检查系统和用于计量测量或检查的照明样本的方法。 一个照明子系统包括被配置为产生相干的光脉冲的光源和位于相干脉冲光的路径中的色散元件，该色散元件被配置为通过将光分布的空间和时间特征混合在一起来减小光脉冲的相干性 光的脉冲。 照明子系统还包括位于离开色散元件的光的脉冲的路径中的电光调制器，其被配置为通过暂时调制光脉冲中的光分布来减小光脉冲的相干性。 照明子系统被配置为将来自电光调制器的光脉冲引导到样本。

    Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population
    3.
    发明授权
    Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population 有权
    通过抑制瞬态颜色中心的形成和控制声子的数量来减轻光学材料中的激光损伤

    公开(公告)号：US08711896B2

    公开(公告)日：2014-04-29

    申请号：US12772953

    申请日：2010-05-03

    Applicant: Vladimir Dribinski ,  Yung-Ho Alex Chuang

    Inventor： Vladimir Dribinski ,  Yung-Ho Alex Chuang

    IPC: H01S3/091

    CPC classification number: H01S3/10 ,  G02F1/3525 ,  H01S3/005 ,  H01S3/091

    Abstract: Laser-induced damage in an optical material can be mitigated by creating conditions at which light absorption is minimized. Specifically, electrons populating defect energy levels of a band gap in an optical material can be promoted to the conduction band—a process commonly referred to as bleaching. Such bleaching can be accomplished using a predetermined wavelength that ensures minimum energy deposition into the material, ideally promoting electron to just inside the conduction band. In some cases phonon (i.e. thermal) excitation can also be used to achieve higher depopulation rates. In one embodiment, a bleaching light beam having a wavelength longer than that of the laser beam can be combined with the laser beam to depopulate the defect energy levels in the band gap. The bleaching light beam can be propagated in the same direction or intersect the laser beam.

    Abstract translation: 可以通过产生光吸收最小化的条件来减轻光学材料中的激光诱导的损伤。 具体地说，填充光学材料中的带隙的缺陷能级的电子能够促进通常被称为漂白的传导带。 这样的漂白可以使用确保最小能量沉积到材料中的预定波长来实现，理想地促进电子刚好在导带内部。 在某些情况下，也可以使用声子（即热）激发来实现更高的人口流动率。 在一个实施例中，具有比激光束长的波长的波长的漂白光束可以与激光束组合以对带隙中的缺陷能级进行衰减。 漂白光束可以沿相同方向传播或与激光束相交。

    Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements
    6.
    发明授权
    Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements 有权
    计量系统的照明子系统，计量系统以及用于计量测量的照明样本的方法

    公开(公告)号：US09080990B2

    公开(公告)日：2015-07-14

    申请号：US13061936

    申请日：2009-09-29

    Applicant: Yung-Ho (Alex) Chuang ,  Vladimir Levinski ,  Xuefeng Liu

    Inventor： Yung-Ho (Alex) Chuang ,  Vladimir Levinski ,  Xuefeng Liu

    IPC: G01N21/55 ,  G01N21/95 ,  G01N21/47

    CPC classification number: G01N21/9501 ,  G01N2021/479

    Abstract: Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements are provided. One illumination subsystem includes a light source configured to generate coherent pulses of light and a dispersive element positioned in the path of the coherent pulses of light, which is configured to reduce coherence of the pulses of light by mixing spatial and temporal characteristics of light distribution in the pulses of light. The illumination subsystem also includes an electro-optic modulator positioned in the path of the pulses of light exiting the dispersive element and which is configured to reduce the coherence of the pulses of light by temporally modulating the light distribution in the pulses of light. The illumination subsystem is configured to direct the pulses of light from the electro-optic modulator to a specimen positioned in the metrology system.

    Abstract translation: 提供了计量系统的照明子系统，计量系统和用于度量测量的照明样本的方法。 一个照明子系统包括被配置为产生相干的光脉冲的光源和位于相干脉冲光的路径中的色散元件，该色散元件被配置为通过将光分布的空间和时间特征混合在一起来减小光脉冲的相干性 光的脉冲。 照明子系统还包括位于离开色散元件的光的脉冲的路径中的电光调制器，其被配置为通过暂时调制光脉冲中的光分布来减小光脉冲的相干性。 照明子系统被配置为将来自电光调制器的光的脉冲引导到位于计量系统中的样本。

Patent Agency Ranking