发明授权
- 专利标题: Cryopump network
- 专利标题(中): 冷冻网络
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申请号: US12864142申请日: 2009-01-22
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公开(公告)号: US08874274B2公开(公告)日: 2014-10-28
- 发明人: Randall J. McDonald , Oliver J. Dumas , Robert P. Sullivan , John J. Varone , Joseph Chopy, Jr. , Daniel R. Jankins
- 申请人: Randall J. McDonald , Oliver J. Dumas , Robert P. Sullivan , John J. Varone , Joseph Chopy, Jr. , Daniel R. Jankins
- 申请人地址: US MA Chelmsford
- 专利权人: Brooks Automation, Inc.
- 当前专利权人: Brooks Automation, Inc.
- 当前专利权人地址: US MA Chelmsford
- 代理机构: Hamilton, Brook, Smith & Reynolds, P.C.
- 国际申请: PCT/US2009/000409 WO 20090122
- 国际公布: WO2009/094162 WO 20090730
- 主分类号: G05D7/00
- IPC分类号: G05D7/00 ; G05B19/18 ; H04L12/403 ; G05B9/02
摘要:
A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.
公开/授权文献
- US20110016891A1 Cryopump Network 公开/授权日:2011-01-27
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