Cryopump network
    1.
    发明授权
    Cryopump network 有权
    冷冻网络

    公开(公告)号:US08874274B2

    公开(公告)日:2014-10-28

    申请号:US12864142

    申请日:2009-01-22

    CPC分类号: H04L12/403 G05B9/02

    摘要: A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.

    摘要翻译: 真空网络控制系统包括被配置为控制系统的操作过程的多个节点。 多个节点在网络环或其他拓扑中被配置为用于控制操作过程的可选主节点。 控制可以分布在每个节点之间,并在每个节点之间传递。 网络上的每个节点监视相邻的网络连接器,以检测网络中的故障。 响应于检测到的故障,断开连接被映射到故障,并且重新配置网络拓扑以在节点之间和外部设备之间继续通信。

    Helium management control system
    4.
    发明授权
    Helium management control system 有权
    氦管理控制系统

    公开(公告)号:US07788942B2

    公开(公告)日:2010-09-07

    申请号:US11590673

    申请日:2006-10-31

    IPC分类号: F25B45/00 B01D8/00 F25J1/00

    摘要: A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.

    摘要翻译: 用于控制来自公共歧管的氦制冷剂供应的氦管理控制系统为多个低温冰箱供应适当的氦气供应。 该系统采用多个传感器来监视和调节整个制冷剂供应,以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。 通过检测过量稀疏氦制冷剂并相应地重新分配制冷剂,将适当的氦气供应分配给每个低温泵。 如果总制冷供应超过总制冷剂需求或消耗量,则过量的制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 类似地,如果总制冷需求超过总制冷供应,则对一些或所有低温冰箱的制冷剂供应将相应地减小,从而基于当前的冷却功能来最小化有害或减速效果。

    Helium management control system
    5.
    发明授权
    Helium management control system 有权
    氦管理控制系统

    公开(公告)号:US08869552B2

    公开(公告)日:2014-10-28

    申请号:US13605738

    申请日:2012-09-06

    摘要: A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.

    摘要翻译: 用于控制来自普通歧管的氦制冷剂供应的氦管理控制系统为具有适当氦气供应的低温冰箱供应。 该系统采用传感器来监测和调节整个制冷剂供应,以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。 通过感应过多的稀疏氦和相应地重新分配制冷剂,向每个低温泵分配适当的氦气供应。 如果总制冷供应超过需求或消耗,则过剩制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 如果总制冷需求超过总制冷供应,则对一些或所有低温冰箱的制冷剂供应将相应减少,从而基于当前的冷却功能使有害或减速效果最小化。

    Helium management control system
    7.
    发明授权
    Helium management control system 有权
    氦管理控制系统

    公开(公告)号:US08261562B2

    公开(公告)日:2012-09-11

    申请号:US12848681

    申请日:2010-08-02

    摘要: A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.

    摘要翻译: 用于控制来自公共歧管的氦制冷剂供应的氦管理控制系统为多个低温冰箱供应适当的氦气供应。 该系统采用多个传感器来监视和调节整个制冷剂供应,以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。 通过检测过量稀疏氦制冷剂并相应地重新分配制冷剂,将适当的氦气供应分配给每个低温泵。 如果总制冷供应超过总制冷剂需求或消耗量,则过量的制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 类似地,如果总制冷需求超过总制冷供应,则对一些或所有低温冰箱的制冷剂供应将相应地减小,从而基于当前的冷却功能来最小化有害或减速效果。