- 专利标题: Solid-state imaging device
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申请号: US13365627申请日: 2012-02-03
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公开(公告)号: US08878265B2公开(公告)日: 2014-11-04
- 发明人: Shogo Furuya , Hirofumi Yamashita , Tetsuya Yamaguchi
- 申请人: Shogo Furuya , Hirofumi Yamashita , Tetsuya Yamaguchi
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2011-023020 20110204
- 主分类号: H01L31/101
- IPC分类号: H01L31/101 ; H01L27/146
摘要:
According to one embodiment, a solid-state imaging device includes a first element formation region surrounded by an element isolation region in a semiconductor substrate having a first and a second surface, an upper element isolation layer on the first surface in the element formation region, a lower element isolation layer between the second surface and the upper element isolation layer, a first photodiode in the element formation region, a floating diffusion in the element formation region, and a first transistor disposed between the first photodiode and the floating diffusion. A side surface of the lower element isolation layer protrudes closer to the transistor than a side surface of the upper element isolation layer.
公开/授权文献
- US08916917B2 Solid-state imaging device 公开/授权日:2014-12-23
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