发明授权
US08882433B2 Integrated systems for interfacing with substrate container storage systems
有权
用于与衬底容器存储系统连接的集成系统
- 专利标题: Integrated systems for interfacing with substrate container storage systems
- 专利标题(中): 用于与衬底容器存储系统连接的集成系统
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申请号: US12780846申请日: 2010-05-14
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公开(公告)号: US08882433B2公开(公告)日: 2014-11-11
- 发明人: Anthony C. Bonora , Richard H. Gould , Michael Krolak
- 申请人: Anthony C. Bonora , Richard H. Gould , Michael Krolak
- 申请人地址: US MA Chelmsford
- 专利权人: Brooks Automation, Inc.
- 当前专利权人: Brooks Automation, Inc.
- 当前专利权人地址: US MA Chelmsford
- 代理机构: Martine Penilla Group, LLP
- 主分类号: B65G1/133
- IPC分类号: B65G1/133 ; H01L21/677
摘要:
A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop. Example configurations of the storage system can include one or more of stationary shelves, extended horizontal tracks for hoists, conveyors at the level of the storage system assembly, and a manual loading station. The hoist, with an extended horizontal track can therefore interface with the manual loading station.
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