Invention Grant
- Patent Title: Data path for lithography apparatus
- Patent Title (中): 光刻设备的数据路径
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Application No.: US13290141Application Date: 2011-11-07
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Publication No.: US08884255B2Publication Date: 2014-11-11
- Inventor: Henk Derks , Marco Jan-Jaco Wieland , Teunis Van De Peut
- Applicant: Henk Derks , Marco Jan-Jaco Wieland , Teunis Van De Peut
- Applicant Address: NL Delft
- Assignee: Mapper Lithography IP B.V.
- Current Assignee: Mapper Lithography IP B.V.
- Current Assignee Address: NL Delft
- Agency: Hoyng Monegier LLP
- Agent David P. Owen
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/317 ; B82Y10/00 ; B82Y40/00

Abstract:
A maskless charged particle lithography system comprises an electron-optical column and a data path. The column includes a blanker array including blanker elements. The data path comprises a preprocessing system, transmission channels, and a pattern streaming system. The lithography system is configured for exposing a target field in two passes by allocating a first beamlet subset for exposing a first field subset during a first pass and a second beamlet subset for exposing a second field subset during a second pass. A first beam selector selects a first pattern data subset containing exposure data for the first beamlet subset and a second pattern data subset containing exposure data for the second beamlet subset. Second beam selectors connect transmission channels assigned for transmitting the first pattern data subset to a first blanker elements subset, and transmission channels assigned for transmitting the second pattern data subset to a second blanker elements subset.
Public/Granted literature
- US20120286168A1 DATA PATH FOR LITHOGRAPHY APPARATUS Public/Granted day:2012-11-15
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