发明授权
- 专利标题: Semiconductor devices including dual gate electrode structures and related methods
- 专利标题(中): 包括双栅电极结构和相关方法的半导体器件
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申请号: US13298644申请日: 2011-11-17
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公开(公告)号: US08884340B2公开(公告)日: 2014-11-11
- 发明人: Ji-Young Kim , Gyo-Young Jin , Hyeong-Sun Hong , Yong-Chul Oh , Yoo-Sang Hwang , Sung-Kwan Choi , Dong-Soo Woo , Hyun-Woo Chung
- 申请人: Ji-Young Kim , Gyo-Young Jin , Hyeong-Sun Hong , Yong-Chul Oh , Yoo-Sang Hwang , Sung-Kwan Choi , Dong-Soo Woo , Hyun-Woo Chung
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR10-2011-0060290 20110621
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L29/772 ; G11C11/404 ; H01L27/108 ; H01L29/66 ; H01L29/78 ; G11C11/408 ; H01L29/417 ; H01L29/423 ; H01L21/8234
摘要:
A semiconductor device may include a semiconductor substrate with first and second spaced apart source/drain regions defining a channel region therebetween and a control gate structure on the channel region between the first and second spaced apart source/drain regions. More particularly, the control gate structure may include a first gate electrode on the channel region adjacent the first source/drain region, and a second gate electrode on the channel region adjacent the second source/drain region. Moreover, the first and second gate electrodes may be electrically isolated. Related devices, structures, methods of operation, and methods of fabrication are also discussed.
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