Invention Grant
- Patent Title: Vibrating micromechanical system having beam-shaped element
- Patent Title (中): 具有波束形元件的振动微机械系统
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Application No.: US13262592Application Date: 2009-03-31
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Publication No.: US08887571B2Publication Date: 2014-11-18
- Inventor: Marco Dienel , Roman Forke , Dirk Scheibner
- Applicant: Marco Dienel , Roman Forke , Dirk Scheibner
- Applicant Address: DE Munich
- Assignee: Siemens Aktiengesellschaft
- Current Assignee: Siemens Aktiengesellschaft
- Current Assignee Address: DE Munich
- Agency: Staas & Halsey LLP
- International Application: PCT/EP2009/002512 WO 20090331
- International Announcement: WO2010/112051 WO 20101007
- Main IPC: G01N29/00
- IPC: G01N29/00 ; B81B3/00
Abstract:
An exposed end of a micromechanical system having at least one beam-shaped element is connected to a further element of the micromechanical system at the other end thereof. To optimize the mechanical properties of the micromechanical system, recesses are provided in the beam-shaped element in such a way that the mass of the beam-shaped elements decreases toward the exposed end.
Public/Granted literature
- US20120017683A1 VIBRATING MICROMECHANICAL SYSTEM HAVING BEAM-SHAPED ELEMENT Public/Granted day:2012-01-26
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