Invention Grant
- Patent Title: Charge trapping devices with field distribution layer over tunneling barrier
- Patent Title (中): 带隧道势垒的场分布层的电荷俘获装置
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Application No.: US13210202Application Date: 2011-08-15
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Publication No.: US08889509B2Publication Date: 2014-11-18
- Inventor: Hang-Ting Lue
- Applicant: Hang-Ting Lue
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/792 ; H01L21/28 ; H01L29/788 ; H01L29/423 ; H01L27/115

Abstract:
A memory cell comprising: a semiconductor substrate with a surface with a source region and a drain region disposed below the surface of the substrate and separated by a channel region; a tunneling barrier dielectric structure with an effective oxide thickness of greater than 3 nanometers disposed above the channel region; a conductive layer disposed above the tunneling barrier dielectric structure and above the channel region; a charge trapping structure disposed above the conductive layer and above the channel region; a top dielectric structure disposed above the charge trapping structure and above the channel region; and a top conductive layer disposed above the top dielectric structure and above the channel region are described along with devices thereof and methods for manufacturing.
Public/Granted literature
- US20110300682A1 CHARGE TRAPPING DEVICES WITH FIELD DISTRIBUTION LAYER OVER TUNNELING BARRIER Public/Granted day:2011-12-08
Information query
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