发明授权
- 专利标题: Method of and apparatus for detecting cracks in piezoelectric element
- 专利标题(中): 压电元件裂纹检测方法及装置
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申请号: US13287840申请日: 2011-11-02
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公开(公告)号: US08890553B2公开(公告)日: 2014-11-18
- 发明人: Eijiro Furuta , Hajime Arai
- 申请人: Eijiro Furuta , Hajime Arai
- 申请人地址: JP Kanagawa
- 专利权人: NHK Spring Co., Ltd.
- 当前专利权人: NHK Spring Co., Ltd.
- 当前专利权人地址: JP Kanagawa
- 代理机构: Jordan and Hamburg LLP
- 优先权: JP2010-274270 20101209
- 主分类号: G01R29/22
- IPC分类号: G01R29/22 ; G01N27/02
摘要:
A method detects one or more cracks in a piezoelectric element interposed between a pair of electrodes and deforms according to a voltage applied thereto through the pair of electrodes. The method includes steps of applying a voltage at least at a resonance frequency of the piezoelectric element to the piezoelectric element through the pair of electrodes, measuring a dielectric tangent between the pair of electrodes under the applied voltage, and detecting if there are cracks in the piezoelectric element according to the measured dielectric tangent. The dielectric tangent of the piezoelectric element at the resonance frequency has a large peak or no peak depending on whether or not the piezoelectric element has cracks. Accordingly, the method easily and surely detects if the piezoelectric element has cracks according to the dielectric tangent of the piezoelectric element measured at the resonance frequency.
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