发明授权
US08890767B2 Active metamaterial device and manufacturing method of the same 有权
活性超材料器件及其制造方法相同

Active metamaterial device and manufacturing method of the same
摘要:
Provided are an active metamaterial device operating at a high speed and a manufacturing method thereof. The active metamaterial device includes a first dielectric layer, a lower electrode disposed on the first dielectric layer, a second dielectric layer disposed on the lower electrode, metamaterial patterns disposed on the second dielectric layer, a couple layer disposed on the metamaterial patterns and the second dielectric layer, a third dielectric layer disposed on the couple layer, and an upper electrode disposed on the third dielectric layer.
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