Invention Grant
- Patent Title: Scanned probe microscopy (SPM) probe having angled tip
- Patent Title (中): 具有倾斜尖端的扫描探针显微镜（SPM）探针
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Application No.: US13539778Application Date: 2012-07-02
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Publication No.: US08893310B2Publication Date: 2014-11-18
- Inventor: Mark C. Reuter , Brian A. Bryce , Bojan R. Ilic , Sandip Tiwari
- Applicant: Mark C. Reuter , Brian A. Bryce , Bojan R. Ilic , Sandip Tiwari
- Applicant Address: US NY Armonk US NY Ithaca
- Assignee: International Business Machines Corporation,Cornell University
- Current Assignee: International Business Machines Corporation,Cornell University
- Current Assignee Address: US NY Armonk US NY Ithaca
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: G01Q70/12
- IPC: G01Q70/12 ; G01Q70/10 ; B82Y15/00
Abstract:
A probe for scanned probe microscopy is provided. The probe includes a cantilever beam and a tip. The cantilever beam extends along a generally horizontal axis. The cantilever beam has a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis. The tip projects outwardly from the crystal facet surface.
Public/Granted literature
- US20140007308A1 Scanned Probe Microscopy (SPM) Probe Having Angled Tip Public/Granted day:2014-01-02
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