发明授权
- 专利标题： Substrate having a transparent electrode and method for producing the same
- 专利标题（中）： 具有透明电极的基板及其制造方法
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申请号： US13061943申请日： 2009-08-26
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公开(公告)号： US08895427B2公开(公告)日： 2014-11-25
- 发明人: Takashi Kuchiyama , Kenji Yamamoto
- 申请人： Takashi Kuchiyama , Kenji Yamamoto
- 申请人地址： JP Osaka
- 专利权人： Kaneka Corporation
- 当前专利权人： Kaneka Corporation
- 当前专利权人地址： JP Osaka
- 代理机构： Alleman Hall McCoy Russell & Tuttle LLP
- 优先权： JP2008-227184 20080904; JP2008-254123 20080930; JP2009-010318 20090120; JP2009-086022 20090331
- 国际申请： PCT/JP2009/064863 WO 20090826
- 国际公布： WO2010/026899 WO 20100311
- 主分类号： H01L21/44
- IPC分类号： H01L21/44
摘要：
A zinc oxide transparent electroconductive oxide has been difficult to use as a substrate having a transparent electrode because the oxide, when configured as a thin film, because of increased resistivity due to air and/or moisture exposure. Though doping can inhibit increase of resistance to some extent, there has been difficulty in selecting a type and an amount of a doping substance and because doping causes high initial resistance. A substrate having a transparent electrode with stable resistivity against various environments is produced by a magnetron sputtering method using a target composed of a zinc oxide transparent electroconductive oxide containing 0.50 to 2.75% silicon dioxide by weight relative to the oxide.