Invention Grant
US08896035B2 Field effect transistor having phase transition material incorporated into one or more components for reduced leakage current
有权
具有并入一个或多个组件中的相变材料的场效应晶体管用于减小漏电流
- Patent Title: Field effect transistor having phase transition material incorporated into one or more components for reduced leakage current
- Patent Title (中): 具有并入一个或多个组件中的相变材料的场效应晶体管用于减小漏电流
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Application No.: US13656819Application Date: 2012-10-22
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Publication No.: US08896035B2Publication Date: 2014-11-25
- Inventor: Kota V. R. M. Murali , Edward J. Nowak , Stuart P. Parkin
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb & Riley, LLC
- Agent Michael J. LeStrange, Esq.
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
Disclosed is a metal oxide semiconductor field effect transistor (MOSFET) having phase transition material incorporated into one or more components and an associated method. The MOSFET can comprise an asymmetric gate electrode having a phase transition material section (e.g., a chromium or titanium-doped vanadium dioxide (VO2) section) above the drain-side of the channel region. Additionally or alternatively, the MOSFET can comprise source and drain contact landing pads comprising different phase transition materials (e.g., un-doped VO2 and chromium or titanium-doped VO2, respectively). In any case, the phase transition material(s) are pre-selected so as to be insulative when the MOSFET is in the OFF state and the voltage difference between the drain region and the source region (VDS) is high in order to minimize leakage current and so as to be conductive when the MOSFET is in the ON state and VDS is high in order to maintain drive current.
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