发明授权
US08896907B2 Plasmonic reflective display fabricated using anodized aluminum oxide
有权
使用阳极氧化铝制造的等离子体反射显示器
- 专利标题: Plasmonic reflective display fabricated using anodized aluminum oxide
- 专利标题(中): 使用阳极氧化铝制造的等离子体反射显示器
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申请号: US13449370申请日: 2012-04-18
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公开(公告)号: US08896907B2公开(公告)日: 2014-11-25
- 发明人: Douglas J. Tweet , Akinori Hashimura , Paul J. Schuele , Apostolos T. Voutsas
- 申请人: Douglas J. Tweet , Akinori Hashimura , Paul J. Schuele , Apostolos T. Voutsas
- 申请人地址: US WA Camas
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人地址: US WA Camas
- 代理机构: Law Office of Gerald Maliszewski
- 代理商 Gerald Maliszewski
- 主分类号: G02B26/00
- IPC分类号: G02B26/00 ; G02F1/1335
摘要:
A method is provided for forming a reflective plasmonic display. The method provides a substrate and deposits a bottom dielectric layer. A conductive film is deposited overlying the bottom dielectric layer. A hard mask is formed with nano-size openings overlying the conductive film. The conductive film is plasma etched via nano-size openings in the hard mask, stopping at the dielectric layer. After removing the hard mask, a conductive film is left with nano-size openings to the dielectric layer. Metal is deposited in the nano-size openings, creating a pattern of metallic nanoparticles overlying the dielectric layer. Then, the conductive film is removed. The hard mask may be formed by conformally depositing an Al film overlying the conductive film and anodizing the Al film, creating a hard mask of porous anodized Al oxide (AAO) film. The porous AAO film may form a short-range hexagonal, and long-range random order hole patterns.
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