Invention Grant
- Patent Title: Organic layer deposition apparatus, organic light-emitting display apparatus, and method of manufacturing the organic light-emitting display apparatus
- Patent Title (中): 有机层沉积装置,有机发光显示装置和有机发光显示装置的制造方法
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Application No.: US13797836Application Date: 2013-03-12
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Publication No.: US08900976B2Publication Date: 2014-12-02
- Inventor: Yong-Hyun Jin , Jae-Ha Lim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2012-0105248 20120921
- Main IPC: H01L21/335
- IPC: H01L21/335 ; H01L21/677 ; C23C14/04 ; C23C14/50 ; C23C14/56 ; H01L27/32 ; C23C14/24 ; H01L21/67 ; H01L51/00

Abstract:
An organic layer deposition apparatus includes a transfer unit; a first conveyer unit including a guide member having accommodation grooves, a first accommodation part, a second accommodation part, and a connection part that connects the first accommodation part to the second accommodation part; a second conveyer unit for moving the transfer unit without the substrate; a loading unit for fixing the substrate on the transfer unit; a deposition unit including a chamber and an organic layer deposition assembly; and an unloading unit for separating the substrate, wherein the first accommodation part of the guide member is located close to ground compared to the second accommodation part, and includes a lower member, an upper member, elastic members located between the lower and upper members. The substrate fixed on the transfer unit is spaced from the organic layer deposition assembly while being transferred by the first conveyer unit.
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