Invention Grant
- Patent Title: Antireflective coating composition and process thereof
- Patent Title (中): 防反射涂料组合物及其工艺
-
Application No.: US13351681Application Date: 2012-01-17
-
Publication No.: US08906590B2Publication Date: 2014-12-09
- Inventor: Dalil M Rahman , Douglas McKenzie , Jianhui Shan , JoonYeon Cho , Salem K. Mullen , Clement Anyadiegwu
- Applicant: Dalil M Rahman , Douglas McKenzie , Jianhui Shan , JoonYeon Cho , Salem K. Mullen , Clement Anyadiegwu
- Applicant Address: US NJ Somerville
- Assignee: AZ Electronic Materials USA Corp.
- Current Assignee: AZ Electronic Materials USA Corp.
- Current Assignee Address: US NJ Somerville
- Agent Sangya Jain
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/30
Abstract:
The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1): -A-B-C- (1) where A is a fused aromatic ring, B has a structure (2), and C is a hydroxybiphenyl of structure (3) where R1 is C1-C4alkyl and R2 is C1-C4alkyl. The invention further relates to a process for forming an image using the composition.
Public/Granted literature
- US20120251956A1 ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF Public/Granted day:2012-10-04
Information query
IPC分类:
