Invention Grant
- Patent Title: Antireflective coating composition and process thereof
- Patent Title (中): 防反射涂料组合物及其工艺
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Application No.: US13563877Application Date: 2012-08-01
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Publication No.: US08906592B2Publication Date: 2014-12-09
- Inventor: M. Dalil Rahman , Clement Anyadiegwu , Douglas McKenzie , JoonYeon Cho
- Applicant: M. Dalil Rahman , Clement Anyadiegwu , Douglas McKenzie , JoonYeon Cho
- Applicant Address: LU Luxembourg
- Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
- Current Assignee: AZ Electronic Materials (Luxembourg) S.A.R.L.
- Current Assignee Address: LU Luxembourg
- Agent Sangya Jain
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/30 ; G03F7/09
Abstract:
The invention relates to an antireflective coating composition comprising a crosslinkable polymer, where the crosslinkable polymer comprises at least one unit of fused aromatic moiety, at least one unit with a phenylene moiety in the backbone of the polymer, and at least one hydroxybiphenyl unit, furthermore where the polymer comprises a crosslinking moiety of structure (4), where R′3, R″3 and R′″3 are independently hydrogen or a C1-C4alkyl. The invention further relates to a process for forming an image using the composition.
Public/Granted literature
- US20140038109A1 ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF Public/Granted day:2014-02-06
Information query
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