发明授权
- 专利标题: Layered radiation-sensitive materials with varying sensitivity
- 专利标题(中): 具有不同灵敏度的分层辐射敏感材料
-
申请号: US12339308申请日: 2008-12-19
-
公开(公告)号: US08906597B2公开(公告)日: 2014-12-09
- 发明人: Jeffrey A. Rock , Gerald W. Fly , Yeh-Hung Lai , Keith E. Newman , Alan J. Jacobsen , William B. Carter , Peter D. Brewer
- 申请人: Jeffrey A. Rock , Gerald W. Fly , Yeh-Hung Lai , Keith E. Newman , Alan J. Jacobsen , William B. Carter , Peter D. Brewer
- 申请人地址: US MI Detroit
- 专利权人: GM Global Technology Operations LLC
- 当前专利权人: GM Global Technology Operations LLC
- 当前专利权人地址: US MI Detroit
- 代理机构: Fraser Clemens Martin & Miller LLC
- 代理商 J. Douglas Miller
- 主分类号: G03F7/26
- IPC分类号: G03F7/26 ; G03F7/095 ; G03F7/20
摘要:
A method for fabricating a radiation-cured structure is provided. The method includes the steps of providing a first radiation-sensitive material and applying a second radiation-sensitive material to the first radiation-sensitive material. The first radiation-sensitive material has a first sensitivity. The second radiation-sensitive material has a second sensitivity different from the first sensitivity. At least one mask is placed between at least one radiation source and the first and second radiation-sensitive materials. The mask has a plurality of substantially radiation-transparent apertures. The first and second radiation-sensitive materials are then exposed to a plurality of radiation beams through the radiation-transparent apertures in the mask to form a first construct in the first radiation-sensitive material and a second construct in the second radiation-sensitive material. The first construct and the second construct cooperate to form the radiation-cured structure.
公开/授权文献
信息查询
IPC分类: