Invention Grant
- Patent Title: Wrap around stressor formation
- Patent Title (中): 围绕压力源的形成
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Application No.: US13840692Application Date: 2013-03-15
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Publication No.: US08906768B2Publication Date: 2014-12-09
- Inventor: Hoong Shing Wong , Min-hwa Chi
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, Inc.
- Current Assignee: GLOBALFOUNDRIES, Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent George S. Blasiak
- Main IPC: H01L29/775
- IPC: H01L29/775 ; H01L29/66 ; H01L29/78

Abstract:
For the formation of a stressor on one or more of a source and drain defined on a fin of FINFET semiconductor structure, a method can be employed including performing selective epitaxial growth (SEG) on one or more of the source and drain defined on the fin, separating the fin from a bulk silicon substrate at one or more of the source and drain, and further performing SEG on one or more of the source and drain to form a wrap around epitaxial growth stressor that stresses a channel connecting the source and drain. The formed stressor can be formed so that the epitaxial growth material defining a wrap around configuration connects to the bulk substrate. The formed stressor can increase mobility in a channel connecting the defined source and drain.
Public/Granted literature
- US20140264489A1 WRAP AROUND STRESSOR FORMATION Public/Granted day:2014-09-18
Information query
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