In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.