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公开(公告)号：US08907303B2
公开(公告)日：2014-12-09
申请号：US14124722
申请日：2012-06-06
申请人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
发明人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20242 , H01J2237/20285 , H01J2237/20292 , H01J2237/28
摘要： In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.
摘要翻译： 在本发明中，舞台装置被配置为：在标本，样本保持器或允许测量位置和方向的旋转台上提供标记; 根据预定的操作模式执行舞台的旋转和平移运动; 测量标记的位置和方向; 从该测量结果中确定旋转台的旋转中心位置; 通过计算用于校正旋转误差的旋转角度校正值和用于校正旋转中心位置的位置变化的平移校正值，进一步创建相对于旋转角度的校正值表; 从校正值表获得与输入的旋转角度指令值或实际旋转角度相关联的校正值; 并且通过校正所输入的旋转角度和平移位置指令值或检测到的旋转角度和平移位置来控制舞台装置。
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公开(公告)号：US20140117251A1
公开(公告)日：2014-05-01
申请号：US14124722
申请日：2012-06-06
申请人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
发明人： Yasuyuki Momoi , Kaname Takahashi , Shigeru Haneda
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20242 , H01J2237/20285 , H01J2237/20292 , H01J2237/28
摘要： In the present invention, a stage device is configured to: provide a marker on a specimen, a specimen holder or a rotary table that allows measurement of position and direction; perform a rotation and translation movement of a stage according to a predetermined operation pattern; measure the position and direction of the marker there; identify the rotation center position of the rotary table from the results of this measurement; further create a correction value table relative to a rotation angle by calculating rotation-angle correction value for correcting the rotation error, and translation correction value for correcting a positional variation of the rotation center position; obtain from the correction value table the correction values associated with either an inputted rotation-angle command value or an actual rotation angle; and control the stage device by correcting either the rotation-angle and translation-position command values inputted or a rotation-angle and translation-position detected.
摘要翻译： 在本发明中，舞台装置被配置为：在标本，样本保持器或允许测量位置和方向的旋转台上提供标记; 根据预定的操作模式执行舞台的旋转和平移运动; 测量标记的位置和方向; 从该测量结果中确定旋转台的旋转中心位置; 通过计算用于校正旋转误差的旋转角度校正值和用于校正旋转中心位置的位置变化的平移校正值，进一步创建相对于旋转角度的校正值表; 从校正值表获得与输入的旋转角度指令值或实际旋转角度相关联的校正值; 并且通过校正所输入的旋转角度和平移位置指令值或检测到的旋转角度和平移位置来控制舞台装置。
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公开(公告)号：US20130082190A1
公开(公告)日：2013-04-04
申请号：US13703688
申请日：2011-06-15
IPC分类号： G21K5/08
CPC分类号： G21K5/08 , H01J37/20 , H01J2237/20278
摘要： Fluctuation in speed when a stage with a sample mounted thereon is moved at low speed is reduced such that an image to be observed is moved at constant speed when performing high-magnification observation using a scanning electron microscope. A control amount is obtained by compensation means from the deviation between position information obtained from position information detected by position detection means through a first low-pass filter and a command value obtained by integrating a speed command value input from stage operation input means and through a second low-pass filter having the same frequency characteristic as the first low-pass filter, and a driving signal to be output to driving means is generated from the added value of the control amount and the speed command value by waveform output means.
摘要翻译： 当安装其上的样品的载物台以低速移动时，速度波动减小，使得使用扫描电子显微镜进行高倍率观察时，要观察的图像以恒定速度移动。 通过补偿装置，通过由位置检测装置通过第一低通滤波器检测到的位置信息和通过积分从载物台操作输入装置输入的速度指令值而获得的指令值，通过补偿装置获得控制量，并通过 具有与第一低通滤波器相同的频率特性的第二低通滤波器，并且通过波形输出装置从控制量和速度指令值的相加值产生要输出到驱动装置的驱动信号。
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公开(公告)号：US20050015099A1
公开(公告)日：2005-01-20
申请号：US10716485
申请日：2003-11-20
申请人： Yasuyuki Momoi , Madoka Sugiura , Takahiro Ochi , Kazuo Yonenobu , Nobuhiko Sugano , Yoshinobu Sato , Yoshikazu Nakajima , Toshihiko Sasama , Takeyoshi Dohi , Ichiro Sakuma
发明人： Yasuyuki Momoi , Madoka Sugiura , Takahiro Ochi , Kazuo Yonenobu , Nobuhiko Sugano , Yoshinobu Sato , Yoshikazu Nakajima , Toshihiko Sasama , Takeyoshi Dohi , Ichiro Sakuma
CPC分类号： A61B90/36 , A61B34/20 , A61B90/13 , A61B2018/2025 , A61B2034/2055 , A61B2034/2057 , A61B2034/2072 , A61B2090/3945 , A61B2090/3983
摘要： A position measuring apparatus, for use in an assisting apparatus for surgical opertions, comprises a position indicating means for indicating a position and a direction of a tool, and a three-dimensional position measuring means for measuring a position and a direction of a surgical field and also the position and the direction of the tool. The position indicating means and the three-dimensional position measuring means are unified in one body in the relative position thereof, so that a position for assistance of surgical operation is indicated in the form of an intersection line or an intersection point of the laser beams, irrespective of the position of the position measuring apparatus.
摘要翻译： 一种用于外科手术辅助装置的位置测量装置，包括用于指示刀具的位置和方向的位置指示装置，以及用于测量手术区域的位置和方向的三维位置测量装置 以及工具的位置和方向。 位置指示装置和三维位置测量装置在其相对位置上统一在一个体中，使得用于辅助外科手术的位置以激光束的交叉线或交点的形式表示， 而与位置测量装置的位置无关。
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5.发明授权公开(公告)号：US06721668B1
公开(公告)日：2004-04-13
申请号：US09381037
申请日：1999-12-02
申请人： Yasuyuki Momoi , Toshihiko Horiuchi , Kazuhiro Umekita , Masahiko Inoue , Takao Konno , Masaharu Sugano , Yuuji Tadano
发明人： Yasuyuki Momoi , Toshihiko Horiuchi , Kazuhiro Umekita , Masahiko Inoue , Takao Konno , Masaharu Sugano , Yuuji Tadano
IPC分类号： G01F1700
摘要： The testing performs a vibration excitation testing of a part of the structure, performs a numerical calculus of vibration response of the other parts of the structure, and calculates the vibration response of a whole of the structure by combining these two methods. Testing includes calculating a position of a point of exciting force on the basis of vibration exciting, and calculating a reaction force on the basis of a load detected and the position of the point of exciting force. Then, a displacement of a numerical model is computed by using the reaction force calculated and a known external force, and calculating a vibration exciting machine displacement command value on the basis of the displacement. A drive drives the vibration exciting on the basis of an output thereof. Vibration excitation is performed in the translational direction as well as the rotational direction.
摘要翻译： 该测试对结构的一部分进行振动激励测试，对结构的其他部分进行振动响应的数值计算，并通过组合这两种方法来计算整个结构的振动响应。 测试包括基于振动激励来计算激励力点的位置，并且基于检测到的负载和激励力点的位置来计算反作用力。 然后，通过使用计算的反作用力和已知的外力来计算数值模型的位移，并且基于位移计算振动激振机械位移指令值。 驱动器基于其输出驱动振动激励。 在平移方向以及旋转方向进行振动激励。
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公开(公告)号：US06629042B2
公开(公告)日：2003-09-30
申请号：US10106537
申请日：2002-03-27
IPC分类号： G01M1000
摘要： The present invention discloses a testing system and a testing method for a structure which tests a structure made of a test piece structure and a numerical model virtually connected to the structure. A simulated structure including a frame, an actuator and a reaction force measuring device is mounted on a foundation on which a shaking table is also mounted. Only the test piece structure is mounted on the shaking table. The motion of the shaking table 5 which is generated at the time of shaking the test piece structure using the shaking table and the actuator is measured by a shaking table motion measuring device, while the reaction force generated by the test piece structure is measured by a reaction force measuring device. Using these measured values and the numerical model stored in a digital computer, the motion of the test piece structure after a predetermined period for the motion of the simulated structure is calculated. The actuator and the shaking table are driven so as to make this calculated motion.
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公开(公告)号：US06575037B2
公开(公告)日：2003-06-10
申请号：US09911477
申请日：2001-07-25
申请人： Yasuyuki Momoi , Toshihiko Horiuchi , Kazuhiro Umekita , Masahiko Inoue , Takao Konno , Masaharu Sugano , Yuuji Tadano
发明人： Yasuyuki Momoi , Toshihiko Horiuchi , Kazuhiro Umekita , Masahiko Inoue , Takao Konno , Masaharu Sugano , Yuuji Tadano
IPC分类号： G01M702
摘要： The testing performs a vibration excitation testing of a part of the structure, performs a numerical calculus of vibration response of the other parts of the structure, and calculates the vibration response of a whole of the structure by combining these two methods. Testing includes calculating a position of a point of exciting force on the basis of vibration exciting, and calculating a reaction force on the basis of a load detected and the position of the point of exciting force. Then, a displacement of a numerical model is computed by using the reaction force calculated and a known external force, and calculating a vibration exciting machine displacement command value on the basis of the displacement. A drive drives the vibration exciting on the basis of an output thereof. Vibration excitation is performed in the translational direction as well as the rotational direction.
摘要翻译： 该测试对结构的一部分进行振动激励测试，对结构的其他部分进行振动响应的数值计算，并通过组合这两种方法来计算整个结构的振动响应。 测试包括基于振动激励来计算激励力点的位置，并且基于检测到的负载和激励力点的位置来计算反作用力。 然后，通过使用计算的反作用力和已知的外力来计算数值模型的位移，并且基于位移计算振动激振机械位移指令值。 驱动器基于其输出驱动振动激励。 在平移方向以及旋转方向进行振动激励。
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公开(公告)号：US06397153B1
公开(公告)日：2002-05-28
申请号：US09339874
申请日：1999-06-25
IPC分类号： G01M1000
摘要： The present invention discloses a testing system and a testing method for a structure which tests a structure made of a test piece structure and a numerical model virtually connected to the structure. A simulated structure including a frame, an actuator and a reaction force measuring device is mounted on a foundation on which a shaking table is also mounted. Only the test piece structure is mounted on the shaking table. The motion of the shaking table 5 which is generated at the time of shaking the test piece structure using the shaking table and the actuator is measured by a shaking table motion measuring device, while the reaction force generated by the test piece structure is measured by a reaction force measuring device. Using these measured values and the numerical model stored in a digital computer, the motion of the test piece structure after a predetermined period for the motion of the simulated structure is calculated. The actuator and the shaking table are driven so as to make this calculated motion.
摘要翻译： 本发明公开了一种测试系统和测试方法，该测试系统和测试方法用于测试由测试片结构构成的结构和与该结构实际连接的数值模型。 包括框架，致动器和反力测量装置的模拟结构安装在也安装有振动台的基础上。 只有试件结构安装在摇台上。 使用振动台和致动器在振动试验片结构时产生的振动台5的运动由振动台运动测量装置测量，同时由试片结构产生的反作用力由 反作用力测量装置。 使用这些测量值和存储在数字计算机中的数值模型，计算在模拟结构的运动的预定时间段之后的测试片结构的运动。 致动器和振动台被驱动以便进行该计算的运动。
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公开(公告)号：US5555179A
公开(公告)日：1996-09-10
申请号：US299632
申请日：1994-09-02
申请人： Masahiro Koyama , Norihisa Miyake , Hiroshi Sakairi , Shizuko Hattori , Yasuyuki Momoi , Tsutomu Fujimoto , Tsuyoshi Kai
发明人： Masahiro Koyama , Norihisa Miyake , Hiroshi Sakairi , Shizuko Hattori , Yasuyuki Momoi , Tsutomu Fujimoto , Tsuyoshi Kai
IPC分类号： G05B15/02 , G05B19/00 , G05B19/409 , G05B19/4155 , G05B19/418 , G06F9/06
CPC分类号： G05B19/41835 , G05B2219/32128 , G05B2219/32129 , G05B2219/32163 , G05B2219/32166 , G05B2219/32167 , Y02P90/12
摘要： A computer-implemented control method and a control apparatus of factory automation system having a cell formed by a plurality of working machines including at least one automated machine to execute a series of works in accordance with a control program. From a cell control program including specifications of working of entire cell that is input to the computer, information relating to working sequence of a plurality of working machines and information about control of inputs and outputs of a plurality of working machines are described, the specifications and informations are extracted by the computer. On the basis of the extracted information, a sequence control program by which control of the working sequence of a plurality of working machines and control of inputs and outputs of a plurality of working machines is generated by the computer are described. From the cell control program, information about operation control of the automated machine and information about synchronization of operation of the working machines are extracted by the computer. On the basis of the extracted information, an automated machine control program, by which processing for exercising control over positioning and operation trajectory of the automated machine are described, is generated by the computer. And working of the cell is controlled in accordance with the sequence control program and the automated machine control program.
摘要翻译： 一种计算机实现的控制方法和工厂自动化系统的控制装置，具有由包括至少一个自动机器的多个工作机构形成的单元，以根据控制程序执行一系列工作。 从包括输入到计算机的整个单元的工作规格的单元控制程序，描述与多个加工机的工作顺序有关的信息以及关于多个加工机械的输入和输出的控制的信息，说明书和 信息由计算机提取。 基于提取的信息，描述了由计算机生成多个工作机械的工作顺序的控制和多个工作机械的输入和输出的控制的顺序控制程序。 从单元控制程序中，通过计算机提取关于自动机的操作控制的信息和关于工作机的操作的同步的信息。 基于提取的信息，描述了通过计算机生成用于对自动化机器的定位和操作轨迹进行控制的处理的自动化机器控制程序。 并且根据顺序控制程序和自动化机器控制程序控制电池的工作。
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公开(公告)号：US08092471B2
公开(公告)日：2012-01-10
申请号：US10716485
申请日：2003-11-20
申请人： Yasuyuki Momoi , Madoka Sugiura , Takahiro Ochi , Kazuo Yonenobu , Nobuhiko Sugano , Yoshinobu Sato , Yoshikazu Nakajima , Toshihiko Sasama , Takeyoshi Dohi , Ichiro Sakuma
发明人： Yasuyuki Momoi , Madoka Sugiura , Takahiro Ochi , Kazuo Yonenobu , Nobuhiko Sugano , Yoshinobu Sato , Yoshikazu Nakajima , Toshihiko Sasama , Takeyoshi Dohi , Ichiro Sakuma
IPC分类号： A61B19/00
CPC分类号： A61B90/36 , A61B34/20 , A61B90/13 , A61B2018/2025 , A61B2034/2055 , A61B2034/2057 , A61B2034/2072 , A61B2090/3945 , A61B2090/3983
摘要： A position measuring apparatus, for use in an assisting apparatus for surgical opertions, includes a position indicating apparatus for indicating a position and a direction of a tool, and three-dimensional position measuring apparatus for measuring a position and a direction of a surgical field and also the position and the direction of the tool. The position indicating apparatus and the three dimensional position measuring apparatus are unified in one body in the relative position thereof, so that a position for assistance of surgical operation is indicated in the form of an intersection line or an intersection point of the laser beams, irrespective of the position of the position measuring apparatus.
摘要翻译： 一种用于外科手术辅助装置的位置测量装置，包括用于指示刀具的位置和方向的位置指示装置，以及用于测量外科视野的位置和方向的三维位置测量装置，以及 还有工具的位置和方向。 位置指示装置和三维位置测量装置在其相对位置上统一在一个主体中，使得用于协助外科手术的位置以激光束的交叉线或交叉点的形式表示，不管 位置测量装置的位置。
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