发明授权
US08908191B2 Method for zero-contact measurement of topography 有权
地形零接触测量方法

Method for zero-contact measurement of topography
摘要:
A method for zero-contact measurement of the topography of a spherically or aspherically curved air-glass surface of an optical lens or lens combination, distinguished in that the surface (S1) to be measured is sampled on its glass rear side with an optical measurement beam through the air-glass surface (S2) lying before it in the measurement direction. A device for carrying out the method is characterized in that a) the optical lens (2) or the lens system is fastened on the end side of a rotatably mounted hollow shaft (1) such that the optical axis of the lens or lens system is at least approximately aligned with the rotation axis (3) of the hollow shaft (1), b) focusing optics (6) for an optical measurement beam (10) are arranged inside the hollow shaft, c) the measurement unit (7) for generating the measurement beam (10) is arranged so as to be displaceable perpendicularly to the rotation axis (3) of the hollow shaft (1), d) at least one beam splitter (11) for separating a partial beam and forwarding it onto at least one optical sensor (12) is inserted into the measurement beam (10), and e) an optoelectronic transducer and evaluation electronics are assigned to the sensor (12).
公开/授权文献
信息查询
0/0