发明授权
- 专利标题： Method for improving quality of spalled material layers
- 专利标题（中）： 提高剥离材料层质量的方法
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申请号： US13565378申请日： 2012-08-02
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公开(公告)号： US08916450B2公开(公告)日： 2014-12-23
- 发明人: Stephen W. Bedell , Keith E. Fogel , Paul A. Lauro , Ning Li , Devendra K. Sadana , Katherine L. Saenger , Ibrahim Alhomoudi
- 申请人： Stephen W. Bedell , Keith E. Fogel , Paul A. Lauro , Ning Li , Devendra K. Sadana , Katherine L. Saenger , Ibrahim Alhomoudi
- 申请人地址： US NY Armonk SA Riyadh
- 专利权人： International Business Machines Corporation,King Abdulaziz City for Science and Technology
- 当前专利权人： International Business Machines Corporation,King Abdulaziz City for Science and Technology
- 当前专利权人地址： US NY Armonk SA Riyadh
- 代理机构： Scully, Scott, Murphy & Presser, P.C.
- 代理商 Louis J. Percello, Esq.
- 主分类号： H01L21/30
- IPC分类号： H01L21/30 ; H01L21/46 ; H01L21/00
摘要：
Methods for removing a material layer from a base substrate utilizing spalling in which mode III stress, i.e., the stress that is perpendicular to the fracture front created in the base substrate, during spalling is reduced. The substantial reduction of the mode III stress during spalling results in a spalling process in which the spalled material has less surface roughness at one of its' edges as compared to prior art spalling processes in which the mode III stress is present and competes with spalling.
公开/授权文献
- US20140034699A1 METHOD FOR IMPROVING QUALITY OF SPALLED MATERIAL LAYERS 公开/授权日：2014-02-06
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