Invention Grant
US08921850B2 Oxide thin film transistor, method for fabricating TFT, array substrate for display device and method for fabricating the same
有权
氧化物薄膜晶体管,TFT制造方法,显示装置用阵列基板及其制造方法
- Patent Title: Oxide thin film transistor, method for fabricating TFT, array substrate for display device and method for fabricating the same
- Patent Title (中): 氧化物薄膜晶体管,TFT制造方法,显示装置用阵列基板及其制造方法
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Application No.: US13728732Application Date: 2012-12-27
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Publication No.: US08921850B2Publication Date: 2014-12-30
- Inventor: SangHee Yu
- Applicant: LG Display Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Fenwick & West LLP
- Priority: KR10-2012-0055683 20120524
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/15 ; H01L29/66 ; H01L29/417 ; H01L29/423

Abstract:
A thin film transistor (TFT), a method for fabricating a TFT, an array substrate for a display device having a TFT, and a method for fabricating the same are provided. An oxide thin film transistor (TFT) includes: a gate electrode formed on a substrate; a gate insulating layer formed on the gate electrode; an active layer formed on the gate insulating layer above the gate electrode; an etch stop layer pattern formed on the active layer; a source alignment element and a drain alignment element formed on the etch stop layer pattern and spaced apart from one another; and a source electrode in contact with the source alignment element and the active layer and a drain electrode in contact with the drain alignment element and the active layer.
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