Invention Grant
- Patent Title: Integrated circuit resistor
- Patent Title (中): 集成电路电阻
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Application No.: US13294251Application Date: 2011-11-11
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Publication No.: US08921946B2Publication Date: 2014-12-30
- Inventor: King-Yuen Wong , Chia-Pin Lin , Chia-Yu Lu , Yi-Cheng Tsai , Da-Wen Lin , Kuo-Feng Yu
- Applicant: King-Yuen Wong , Chia-Pin Lin , Chia-Yu Lu , Yi-Cheng Tsai , Da-Wen Lin , Kuo-Feng Yu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L29/772
- IPC: H01L29/772 ; H01L21/265 ; H01L27/06 ; H01L29/8605 ; H01L29/66
Abstract:
A semiconductor device includes a substrate including an isolation region, and a resistor disposed over the isolation region, wherein the resistor includes an implant with an inverse box-like dopant profile that minimizes resistance variation from subsequent planarization variation. A contact is disposed over the resistor. A method of fabricating such a semiconductor device is also provided.
Public/Granted literature
- US20130119480A1 INTEGRATED CIRCUIT RESISTOR Public/Granted day:2013-05-16
Information query
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