发明授权
- 专利标题: Uniformity during planarization of a disk
- 专利标题(中): 磁盘平面化时的均匀性
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申请号: US13414568申请日: 2012-03-07
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公开(公告)号: US08926400B2公开(公告)日: 2015-01-06
- 发明人: Neale M. Jones , Kurt A. Rubin
- 申请人: Neale M. Jones , Kurt A. Rubin
- 申请人地址: NL Amsterdam
- 专利权人: HGST Netherlands B.V.
- 当前专利权人: HGST Netherlands B.V.
- 当前专利权人地址: NL Amsterdam
- 代理机构: Kunzler Law Group, PC
- 主分类号: B24B1/00
- IPC分类号: B24B1/00 ; B24B5/02 ; B24B5/313
摘要:
An apparatus, system, and method are provided for reducing edge damage of a disk during chemical mechanical polishing. The apparatus includes a disk carrier configured to receive a disk, the disk having an outside edge and an inside edge, a raised ring adjacent the outside edge of the disk and extending from a surface of the disk carrier to a height greater than a height of the disk, and a raised column adjacent the inside edge of the disk and having a height greater than a height of the disk. The system includes a disk carrier for receiving a disk, a raised ring adjacent the outside edge of each opening, and plugs insertable into a central opening in the disk and having a height greater than a height of the disk. The method includes providing the apparatus, inserting a disk into the apparatus, and polishing the disk.
公开/授权文献
- US20130236678A1 UNIFORMITY DURING PLANARIZATION OF A DISK 公开/授权日:2013-09-12
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