Invention Grant
- Patent Title: Micromechanical component and method for the manufacture of same
- Patent Title (中): 微机械部件及其制造方法
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Application No.: US13757261Application Date: 2013-02-01
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Publication No.: US08928099B2Publication Date: 2015-01-06
- Inventor: Johannes Classen , Jochen Reinmuth , Andreas Scheurle
- Applicant: Johannes Classen , Jochen Reinmuth , Andreas Scheurle
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102012201480 20120202
- Main IPC: H01L29/84
- IPC: H01L29/84 ; G01P15/08 ; B81B3/00 ; B81C1/00 ; G01P15/125
Abstract:
A method for manufacturing a micromechanical component is described in which a trench etching process and a sacrificial layer etching process are carried out to form a mass situated movably on a substrate. The movable mass has electrically isolated and mechanically coupled subsections of a functional layer. A micromechanical component having a mass situated movably on a substrate is also described.
Public/Granted literature
- US20130200473A1 MICROMECHANICAL COMPONENT AND METHOD FOR THE MANUFACTURE OF SAME Public/Granted day:2013-08-08
Information query
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