发明授权
US08930156B2 Metrology through use of feed forward feed sideways and measurement cell re-use
有权
通过使用前馈饲料进行横向计量和测量细胞再利用
- 专利标题： Metrology through use of feed forward feed sideways and measurement cell re-use
- 专利标题（中）： 通过使用前馈饲料进行横向计量和测量细胞再利用
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申请号： US12502112申请日： 2009-07-13
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公开(公告)号： US08930156B2公开(公告)日： 2015-01-06
- 发明人: Michael Adel , Leonid Poslavsky , John Fielden , John Madsen , Robert Peters
- 申请人： Michael Adel , Leonid Poslavsky , John Fielden , John Madsen , Robert Peters
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Corporation
- 当前专利权人： KLA-Tencor Corporation
- 当前专利权人地址： US CA Milpitas
- 代理机构： JDI Patent
- 代理商 Joshua D. Isenberg
- 主分类号： G06F19/00
- IPC分类号： G06F19/00 ; H01L21/66
摘要：
Metrology may be implemented during semiconductor device fabrication by a) modeling a first measurement on a first test cell formed in a layer of a partially fabricated device; b) performing a second measurement on a second test cell in the layer; c) feeding information from the second measurement into the modeling of the first measurement; and after a lithography pattern has been formed on the layer including the first and second test cells, d) modeling a third and a fourth measurement on the first and second test cells respectively using information from a) and b) respectively.
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