发明授权
US08933384B2 Multi-technique imaging system using vertical motion of stage to switch imaging techniques
有权
多技术成像系统采用垂直运动的舞台切换成像技术
- 专利标题: Multi-technique imaging system using vertical motion of stage to switch imaging techniques
- 专利标题(中): 多技术成像系统采用垂直运动的舞台切换成像技术
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申请号: US13430316申请日: 2012-03-26
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公开(公告)号: US08933384B2公开(公告)日: 2015-01-13
- 发明人: Cagri A. Savran , Khalid M. Arif
- 申请人: Cagri A. Savran , Khalid M. Arif
- 申请人地址: US IN West Lafayette
- 专利权人: Purdue Research Foundation
- 当前专利权人: Purdue Research Foundation
- 当前专利权人地址: US IN West Lafayette
- 代理机构: Purdue Research Foundation
- 主分类号: G02B27/00
- IPC分类号: G02B27/00 ; G02B7/00 ; H01L27/00 ; G01N21/55 ; G02B21/00 ; G02B21/18 ; G02B21/36 ; G01N21/47 ; G01N21/64 ; G01N21/65
摘要:
A system for and method of performing multi-technique imaging. Such multi-technique imaging system includes a surface for supporting a specimen and at least two illumination sources for producing light radiation. The system also includes a plurality of reflective and refractive devices arranged to direct at least part of the light radiation from each of the at least two illumination sources to the surface such that at least part of the light radiation from each of the at least two illumination sources illuminates substantially the same area on the surface. The system also includes a sensor configured to receive light radiation from the at least two illumination sources reflected by the specimen and/or that pass by the specimen. The system also includes a power source configured to power the at least two illumination sources and the sensor.
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