Invention Grant
US08933384B2 Multi-technique imaging system using vertical motion of stage to switch imaging techniques
有权
多技术成像系统采用垂直运动的舞台切换成像技术
- Patent Title: Multi-technique imaging system using vertical motion of stage to switch imaging techniques
- Patent Title (中): 多技术成像系统采用垂直运动的舞台切换成像技术
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Application No.: US13430316Application Date: 2012-03-26
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Publication No.: US08933384B2Publication Date: 2015-01-13
- Inventor: Cagri A. Savran , Khalid M. Arif
- Applicant: Cagri A. Savran , Khalid M. Arif
- Applicant Address: US IN West Lafayette
- Assignee: Purdue Research Foundation
- Current Assignee: Purdue Research Foundation
- Current Assignee Address: US IN West Lafayette
- Agency: Purdue Research Foundation
- Main IPC: G02B27/00
- IPC: G02B27/00 ; G02B7/00 ; H01L27/00 ; G01N21/55 ; G02B21/00 ; G02B21/18 ; G02B21/36 ; G01N21/47 ; G01N21/64 ; G01N21/65

Abstract:
A system for and method of performing multi-technique imaging. Such multi-technique imaging system includes a surface for supporting a specimen and at least two illumination sources for producing light radiation. The system also includes a plurality of reflective and refractive devices arranged to direct at least part of the light radiation from each of the at least two illumination sources to the surface such that at least part of the light radiation from each of the at least two illumination sources illuminates substantially the same area on the surface. The system also includes a sensor configured to receive light radiation from the at least two illumination sources reflected by the specimen and/or that pass by the specimen. The system also includes a power source configured to power the at least two illumination sources and the sensor.
Public/Granted literature
- US20120241596A1 System for and Method of Performing Multi-Technique Imaging Public/Granted day:2012-09-27
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