发明授权
- 专利标题: Landing structure for through-silicon via
- 专利标题(中): 穿硅通孔的着陆结构
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申请号: US13725917申请日: 2012-12-21
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公开(公告)号: US08933564B2公开(公告)日: 2015-01-13
- 发明人: Christopher M. Pelto , Ruth A. Brain , Kevin J. Lee , Gerald S. Leatherman
- 申请人: Christopher M. Pelto , Ruth A. Brain , Kevin J. Lee , Gerald S. Leatherman
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt, P.C.
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L21/768
摘要:
Embodiments of the present disclosure describe techniques and configurations associated with forming a landing structure for a through-silicon via (TSV) using interconnect structures of interconnect layers. In eon embodiment, an apparatus includes a semiconductor substrate having a first surface and a second surface opposite to the first surface, a device layer disposed on the first surface of the semiconductor substrate, the device layer including one or more transistor devices, interconnect layers disposed on the device layer, the interconnect layers including a plurality of interconnect structures and one or more through-silicon vias disposed between the first surface and the second surface, wherein the plurality of interconnect structures include interconnect structures that are electrically coupled with the one or more TSVs and configured to provide one or more corresponding landing structures of the one or more TSVs. Other embodiments may be described and/or claimed.
公开/授权文献
- US20140175651A1 LANDING STRUCTURE FOR THROUGH-SILICON VIA 公开/授权日:2014-06-26
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