Invention Grant
- Patent Title: Bundle-guiding optical collector for collecting the emission of a radiation source
- Patent Title (中): 用于收集辐射源的发射的束引导光收发器
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Application No.: US12726081Application Date: 2010-03-17
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Publication No.: US08934085B2Publication Date: 2015-01-13
- Inventor: Udo Dinger , Christopher Weth
- Applicant: Udo Dinger , Christopher Weth
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102007045396 20070921
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03F7/20 ; G02B5/08 ; G02B5/09

Abstract:
A bundle-guiding optical collector collects an emission of a radiation source and forms a radiation bundle from the collected emission. A reflective surface of the collector is the first bundle-forming surface downstream of the radiation source. The reflective surface is formed such that it converts the radiation source into a family of images in a downstream plane. The family of images includes a plurality of radiation source images which are offset to each other in two dimensions (x, y) in a direction perpendicular to the beam direction of the transformed radiation bundle and are arranged relative to each other in a non-rotationally symmetric manner relative to the beam direction of the transformed radiation bundle. The transformed radiation bundle in the downstream plane has a non-rotationally symmetric bundle edge contour relative to the beam direction of the transformed radiation bundle. The result is a collector in which the radiation bundle shape generated by the collector. In other words, the illumination distribution generated by the collector in a defined manner in the plane downstream of the collector has a shape which is freely selectable to the greatest possible extent.
Public/Granted literature
- US20100231882A1 BUNDLE-GUIDING OPTICAL COLLECTOR FOR COLLECTING THE EMISSION OF A RADIATION SOURCE Public/Granted day:2010-09-16
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