发明授权
- 专利标题: Solar cell and manufacturing method thereof
- 专利标题(中): 太阳能电池及其制造方法
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申请号: US13388517申请日: 2009-08-26
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公开(公告)号: US08936949B2公开(公告)日: 2015-01-20
- 发明人: Shoichi Karakida
- 申请人: Shoichi Karakida
- 申请人地址: JP Chiyoda-Ku, Tokyo
- 专利权人: Mitsubishi Electric Corporation
- 当前专利权人: Mitsubishi Electric Corporation
- 当前专利权人地址: JP Chiyoda-Ku, Tokyo
- 代理机构: Buchanan Ingersoll & Rooney PC
- 国际申请: PCT/JP2009/064858 WO 20090826
- 国际公布: WO2011/024264 WO 20110303
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; H01L21/00 ; H01L31/0224 ; H01L31/068 ; G01R31/26
摘要:
A manufacturing method of a solar cell in which a light receiving side electrode including grid electrodes is provided on one side of a semiconductor substrate, comprises: a first step of forming an impurity diffusion layer on one side of the semiconductor substrate of a first conductivity type, the diffusion layer having a second conductivity-type impurity diffused therein; a second step of measuring a sheet resistance value of the diffusion layer at a plurality of measurement points in a surface of the diffusion layer; and a third step of dividing the surface of the diffusion layer into a plurality of areas corresponding to the measured sheet resistance values of the surface of the diffusion layer, setting a distance between adjacent grid electrodes for each of the areas, and forming the light receiving side electrode, which is electrically connected to the diffusion layer, on the diffusion layer.
公开/授权文献
- US20120125420A1 SOLAR CELL AND MANUFACTURING METHOD THEREOF 公开/授权日:2012-05-24
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