发明授权
US08937340B2 Silicon on insulator and thin film transistor bandgap engineered split gate memory
有权
硅绝缘体和薄膜晶体管带隙设计的分离栅极存储器
- 专利标题: Silicon on insulator and thin film transistor bandgap engineered split gate memory
- 专利标题(中): 硅绝缘体和薄膜晶体管带隙设计的分离栅极存储器
-
申请号: US13899629申请日: 2013-05-22
-
公开(公告)号: US08937340B2公开(公告)日: 2015-01-20
- 发明人: Hang-Ting Lue , Erh-Kun Lai
- 申请人: Macronix International Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Macronix International Co., Ltd.
- 当前专利权人: Macronix International Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: McClure, Qualey & Rodack, LLP
- 主分类号: H01L23/52
- IPC分类号: H01L23/52 ; H01L29/66 ; G11C16/04 ; H01L21/28 ; H01L27/115 ; H01L29/792
摘要:
Memory cells comprising thin film transistor, stacked arrays, employing bandgap engineered tunneling layers in a junction free, NAND configuration. The cells comprise a channel region in a semiconductor strip formed on an insulating layer; a tunnel dielectric structure disposed above the channel region, the tunnel dielectric structure comprising a multilayer structure including at least one layer having a hole-tunneling barrier height lower than that at the interface with the channel region; a charge storage layer disposed above the tunnel dielectric structure; an insulating layer disposed above the charge storage layer; and a gate electrode disposed above the insulating layer Arrays and methods of operation are described.
公开/授权文献
信息查询
IPC分类: